基于Polymer/SiO2的快速低功耗可变光衰减器的研制

为了有效改善基于无机材料的可变光衰减器（VOA）功耗大以及全聚合物VOA响应速度慢的问题，设计并研制了一种基于有机聚合物/无机SiO2材料的马赫曾德尔干涉仪(MZI)型VOA器件。根据脊型波导结构的单模传输条件，设计并优化了单模波导的截面尺寸，同时对器件结构进行了模拟，采用光刻和显影等工艺制备出功耗较低、响应速度快的VOA器件。在1550 nm通信波长下，器件的衰减范围为23 dB，最大功耗仅为14 mW，器件的上升时间为252 μs，下降时间为384 μs。实验结果表明，采用有机/无机混合波导结构，并通过对器件结构参数的优化，可以实现功耗低且响应快速的VOA器件。

Abstract

A kind of polymer/SiO2 hybrid Mach-Zehnder interferometer (MZI) variable optical attenuator (VOA) is designed and fabricated. The VOA has lower power consumption than the VOA based on inorganic materials and faster response than the polymer VOA. The cross section size of the single mode waveguide is designed and optimized according to the single mode transmission conditions of ridge waveguide, and the structure of device is also simulated. The VOA with low power consumption and fast response is obtained by using the photolithography and wet-etching fabrication processes. With 1550 nm optical communication wavelength, the dynamic attenuation range of the fabricated VOA is 23 dB and the maximum power consumption is 14 mW. The rise and fall times of the device are 252 μs and 384 μs. The experimental results show that the VOA has a lower power consumption and a faster response with using the organic/inorganic hybrid structure and optimizing the device structure.

参考文献

[1] 殷建玲, 黄旭光, 刘颂豪. 光子晶体波导可调光衰减器[J]. 中国激光, 2007, 34(5): 671-674.

Yin Jianling, Huang Xuguang, Liu Songhao. A variable optical attenuator based on the photonic crystal waveguide[J]. Chinese J Lasers, 2007, 34(5): 671-674.

[2] 刘英明, 徐静, 钟少龙, 等. 基于MEMS微镜的可调光学衰减器[J]. 光电子·激光, 2012, 23(12): 2287-2291.

Liu Yingming, Xu Jing, Zhong Shaolong, et al.. Variable optical attenuator based on MEMS micromirror[J]. Journal of Optoelectronics·Laser, 2012, 23(12): 2287-2291.

[3] 张云聪, 陈哲, 江沛凡, 等. 全光纤热光型可变光衰减器[J]. 中国激光, 2007, 34(8): 1110-1114.

Zhang Yuncong, Chen Zhe, Jiang Peifan, et al.. All-fiber thermo-optical variable optical attenuator[J]. Chinese J Lasers, 2007, 34(8): 1110-1114.

[4] Yuntao L, Jinzhong Y, Yuanyuan C, et al.. Analysis of temperature dependence of silicon-on-insulator thermo-optic attenuator[J]. Chinese Physics Letters, 2007, 24(2): 465-467.

[5] Qing F,Peng C, Hongli X, et al.. Low power-consumption and high response frequency thermo-optic variable optical attenuators based on silicon-on-insulator materials[J]. Chinese Physics Letters, 2005, 22(6): 1452-1455.

[6] Jiang X, Li X, Zhou H, et al.. Compact variable optical attenuator based on multimode interference coupler[J]. IEEE Photonics Technology Letters, 2005, 17(11): 2361-2363.

[7] Li D X, Zhang Y W, Liu L Y, et al.. Low consumption power variable optical attenuator with sol-gel derived organic/inorganic hybrid materials[J]. Opt Express, 2006, 14(13): 6029-6034.

[8] Kim J T, Choi C G. Polymeric PLC-type thermo-optic optical attenuator fabricated by UV imprint technique[J]. Optics Communications, 2006, 257(1): 72-75.

[9] Sahu P P. Variable optical attenuator using thermo-optic two-mode interference device with fast response time[J]. Appl Opt, 2009, 48(21): 4213-4218.

[10] Xiao G Z, Zhang Z Y, Grover C P. A variable optical attenuator based on a straight polymer-silica hybrid channel waveguide[J]. IEEE Photonics Technology Letters, 2004, 16(11): 2511-2513.

[11] Li J, Li J. Variable optical attenuator based on a bent polymer/SiON waveguide[C]. SPIE, 2007, 6781: 678158.

[12] 王微, 孙小强, 王希斌, 等. 低功耗聚合物 Mach-Zehnder 热光开关[J]. 光子学报, 2010, 39(4): 610-613.

Wang Wei, Sun Xiaoqiang, Wang Xibin, et al.. Low power consumption polymer thermo-optic switch with Mach-Zehnder interferometer[J]. Acta Photonica Sinica, 2010, 39(4): 610-613.

[13] Diemeer M B J. Polymeric thermo-optic space switches for optical communications[J]. Optical Materials, 1998, 9(1): 192-200.

[14] 张琨, 岳远斌, 李彤, 等. 感应耦合等离子体刻蚀在聚合物光波导制作中的应用[J]. 中国光学, 2012, 5(1): 64-70.

Zhang Kun, Yue Yuanbin, Li Tong, et al.. Application of ICP etching in fabrication of polymer optical waveguide[J]. Chinese Optics, 2012, 5(1): 64-70.

[15] Yan Y F, Zheng C T, Liang L, et al.. Response-time improvement of a 2×2 thermo-optic switch with polymer/silica hybrid waveguide[J]. Optics Communications, 2012, 285(18): 3758-3762.

[16] Petermann K. Properties of optical rib-guides with large cross-section[J]. Archivfur Elekronik und Uberetragungstechnik, 1976, 30(3): 139-140.

[17] Laurentis M, Irace A, Breglio G. Determination of single mode condition in dielectric rib waveguide with large cross section by finite element analysis[J]. Journal of Computational Electronics, 2007, 6(1-3): 285-287.

[18] Moosburger R, K Petermann. 4×4 digital optical matrix switch using polymeric oversized rib waveguides[J]. IEEE Photonics Technology Letters, 1998, 10(5): 684-686.

曲禄成, 梁磊, 孙健, 王希斌, 王菲, 张大明. 基于Polymer/SiO2的快速低功耗可变光衰减器的研制[J]. 中国激光, 2014, 41(12): 1216001. Qü Lucheng, Liang Lei, Sun Jian, Wang Xibin, Wang Fei, Zhang Daming. Design and Fabrication of Polymer/SiO2 Hybrid Variable Optical Attenuator with Fast Response and Low Power Consumption[J]. Chinese Journal of Lasers, 2014, 41(12): 1216001.

基于Polymer/SiO2的快速低功耗可变光衰减器的研制

关于本站 Cookie 的使用提示

全站搜索

基于Polymer/SiO2的快速低功耗可变光衰减器的研制

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索