[1] 赵新才, 吴云峰, 谢煜, 等. PCB曝光机照明系统的均匀性仿真与研究[J]. 光学仪器, 2010, 32(4): 52-57.

    Zhao X C, Wu Y F, Xie Y, et al. Uniformity simulation and research based on PCB exposure machine illuminating system[J]. Optical Instruments, 2010, 32(4): 52-57.

[2] 赵新才, 刘宁文, 汪伟, 等. 基于Light Tools的PCB曝光机照明系统设计与研究[J]. 光学与光电技术, 2014, 12(1): 41-44.

    Zhao X C, Liu N W, Wang W, et al. Research and design on PCB exposure machine illuminating system based on light tools[J]. Optics and Optoelectronic Technology, 2014, 12(1): 41-44.

[3] 张学成. 基于机器视觉自动对位平行光曝光机关键技术研究[D]. 成都: 电子科技大学, 2012.

    Zhang XC. Research on key technologies of automatic alignment parallel optical exposure machine based on machine vision[D]. Chengdu: University of Electronic Science and Technology of China, 2012.

[4] 尹广玥, 游利兵, 王庆胜, 等. 用于低温多晶硅制备的线光束整形系统[J]. 中国激光, 2017, 44(9): 0906002.

    Yin G Y, You L B, Wang Q S, et al. Line beam shaping system for preparation of low temperature poly-silicon[J]. Chinese Journal of Lasers, 2017, 44(9): 0906002.

[5] Jain K, Zemel M, Klosner M. Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication[J]. Proceedings of the IEEE, 2002, 90(10): 1681-1688.

[6] Baxter GR, TesoneJ, Rivard G. Double-sided circuit board exposure machine and method with opticalregistration and material variation compensation:US5337151[P]. 1994-08-09.

[7] AntoniM, SingerW, SchultzJ, et al. Illumination optics design for EUV lithography[C]. SPIE, 2000, 4146: 25- 34.

[8] 周畅, 李喜峰. 200 mm×200 mm OLED步进投影曝光机[J]. 电子工业专用设备, 2012, 41(3): 12-16.

    Zhou C, Li X F. Projective stepper for 200 mm×200 mm OLED process[J]. Equipment for Electronic Products Marufacturing, 2012, 41(3): 12-16.

[9] 董辉, 张运方, 李慧, 等. 新型激光投影显示方棒照明系统的设计[J]. 激光与光电子学进展, 2012, 49(1): 012202.

    Dong H, Zhang Y F, Li H, et al. Light pipe illumination system design for new laser projection display[J]. Laser & Optoelectronics Progress, 2012, 49(1): 012202.

[10] 刘鹏飞, 杨波, 陆侃. 紫外曝光机均匀照明系统的设计与研究[J]. 光学仪器, 2012, 34(2): 31-36.

    Liu P F, Yang B, Lu K. Design and research on the uniform illumination system of UV exposure machine[J]. Optical Instruments, 2012, 34(2): 31-36.

[11] 雷呈强, 汪岳峰, 殷智勇, 等. 基于微透镜阵列的半导体激光器堆栈匀化系统[J]. 中国激光, 2015, 42(5): 0502009.

    Lei C Q, Wang Y F, Yin Z Y, et al. Homogenization system for diode laser stack beams based on microlens array[J]. Chinese Journal of Lasers, 2015, 42(5): 0502009.

[12] 帅词凤, 尹韶云, 刘显明, 等. 基于双复眼透镜的三基色激光合成均匀白光束[J]. 光学学报, 2016, 36(3): 0314002.

    Shuai C F, Yin S Y, Liu X M, et al. Homogenized white light beam generated by red, green and blue lasers based on double fly-eye lens[J]. Acta Optica Sinica, 2016, 36(3): 0314002.

[13] . 闵秀红. 复眼式, [J]. UV-LED 面光源的曝光机平行光系统 印制电路信息, 2014(4): 33-37.

    Min XH. Exposure machine fly eye type UV-LED surface light source of collimated light system[J]. Printed Circuit Information, 2014( 4): 33- 37.

[14] Deng X M, Liang X C, Chen Z Z, et al. Uniform illumination of large targets using a lens array[J]. Applied Optics, 1986, 25(3): 377-381.

[15] 周平, 陆巍, 林宇翔, 等. 复眼透镜提高液晶投影照明系统的能量利用率[J]. 光学学报, 2004, 24(5): 587-591.

    Zhou P, Lu W, Lin Y X, et al. Fly eye lens array used in liquid crystal projection display with high light efficiency[J]. Acta Optica Sinica, 2004, 24(5): 587-591.

[16] Vanderwerf D F. Polarized illumination system for LCD projector: US5995284[P].1999-11-30.

[17] Luo Y, Feng Z X, Han Y J, et al. Design of compact and smooth free-form optical system with uniform illuminance for LED source[J]. Optics Express, 2010, 18(9): 9055-9063.

[18] 万运佳, 刘杰, 林浩博, 等. 一般LED光源均匀配光的自由曲面菲涅耳透镜[J]. 激光与光电子学进展, 2016, 53(6): 062201.

    Wan Y J, Liu J, Lin H B, et al. Fresnel lens of freeform surface for realizing uniform light distribution on general LED light sources[J]. Laser & Optoelectronics Progress, 2016, 53(6): 062201.

[19] 吴仍茂. 自由曲面照明设计方法的研究[D]. 杭州: 浙江大学, 2013.

    Wu RM. Research on the design method of freeform illumination[D]. Hangzhou: Zhejiang University, 2013.

[20] FruendtJ, JarczynskiM, MitraT. Simultaneous multiple uniform spot generation with micro optics[C]. SPIE, 2008, 7062: 70620S.

[21] 李澄, 李农. 一种用于均匀照明的LED透镜设计方法[J]. 照明工程学报, 2010, 21(3): 46-49.

    Li C, Li N. A LED lens design method for uniform illumination[J]. China Illuminating Engineering Journal, 2010, 21(3): 46-49.

[22] 闫兴涛, 杨建峰, 张国琦, 等. 基于经纬划分和切面迭代的自由曲面LED透镜设计[J]. 激光与光电子学进展, 2011, 48(2): 022201.

    Yan X T, Yang J F, Zhang G Q, et al. Freeform LED lens design based on longitude-latitude division and tangent-plane iteration[J]. Laser & Optoelectronics Progress, 2011, 48(2): 022201.