光学元件双转子抛光技术中类高斯型去除函数建模与逼近

陈华男; 王君林; 李显凌; 王绍治

doi:doi:10.3788/gzxb20134203.0282

光子学报, 2013, 42 (3): 282, 网络出版: 2013-03-05

光学元件双转子抛光技术中类高斯型去除函数建模与逼近

Modelling and Approximation of Gaussian-like Removal Function in Dual-rotor Polishing Technology of Optics Elements

论文大纲

陈华男 ^*王君林李显凌王绍治

作者单位

中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 长春 130033

摘要

在Preston假设基础上, 研究并推导了光学元件抛光过程中“花瓣”型截面磨头在双转子运动形式下的去除函数.提出了“花瓣”型截面磨头的离散点弧长表达方法, 并讨论了该方法的适用范围; 基于离散点弧长法, 推导了“花瓣”型截面磨头在双转子运动形式下的去除函数表达式; 根据可调步长式曲线逼近原理研究了类高斯型目标去除函数的逼近算法; 并得到了类余弦型去除函数的双转子抛光模参量.从而证明了双转子抛光技术可以得到类高斯型去除函数.

Abstract

On the basis of the assumption of Preston, the removal function of grinding head with petal-like section, in the form of dual-rotor movement, in the polishing process of optical elements, is studied and derived. A method, using a finite number of discrete points and its arc length to express the grinding head of petal-like section is proposed. And the scope of application of this method is figured out. On the basis of this method, the expression of the removal function of grinding head with petal-like section, in the form of dual-rotor movement, is derived. According to the curve approximation principle of adjustable steps, the approximation algorithm of Gaussian-like removal function, which is the target function, is studied. And the parameters of dual-rotor polishing modal with cosine-like removal function are got. It is proved that gaussian-like removal function can be got from polishing technology of dual-rotor movement.

参考文献

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陈华男, 王君林, 李显凌, 王绍治. 光学元件双转子抛光技术中类高斯型去除函数建模与逼近[J]. 光子学报, 2013, 42(3): 282. CHEN Hua-nan, WANG Jun-lin, LI Xian-ling, WANG Shao-zhi. Modelling and Approximation of Gaussian-like Removal Function in Dual-rotor Polishing Technology of Optics Elements[J]. ACTA PHOTONICA SINICA, 2013, 42(3): 282.

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