Chinese Optics Letters, 2014, 12 (7): 072201, Published Online: Jun. 26, 2014
Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique Download: 738次
Basic Information
DOI: | 10.3788/col201412.072201 |
中图分类号: | -- |
栏目: | Optical design and fabrication |
项目基金: | -- |
收稿日期: | Nov. 27, 2013 |
修改稿日期: | -- |
网络出版日期: | Jun. 26, 2014 |
通讯作者: | |
备注: | -- |
Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang. Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique[J]. Chinese Optics Letters, 2014, 12(7): 072201.