Chinese Optics Letters, 2014, 12 (7): 072201, Published Online: Jun. 26, 2014
Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique Download: 738次
220.0220 Optical design and fabrication 220.4830 Systems design 310.0310 Thin films 310.1860 Deposition and fabrication
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Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang. Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique[J]. Chinese Optics Letters, 2014, 12(7): 072201.