Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu; Qiwen Li; Xiaodong Lin; Yi Liu; Jinghua Long; Liuyang Wang; Huabin Tang

doi:doi:10.3788/col201412.072201

Chinese Optics Letters, 2014, 12 (7): 072201, Published Online: Jun. 26, 2014

Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique Download： 738次

Juguang Hu Qiwen Li Xiaodong Lin Yi Liu Jinghua Long Liuyang Wang Huabin Tang

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Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang. Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique[J]. Chinese Optics Letters, 2014, 12(7): 072201.