光学仪器, 2012, 34 (5): 5, 网络出版: 2012-12-06
基于像散原理的并行共焦检测的微形貌参数的可视化测量
Visualization measurements of the morphology parameters in a parallel confocal system based on astigmatism method
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赵晶晶, 刘文文. 基于像散原理的并行共焦检测的微形貌参数的可视化测量[J]. 光学仪器, 2012, 34(5): 5. ZHAO Jingjing, LIU Wenwen. Visualization measurements of the morphology parameters in a parallel confocal system based on astigmatism method[J]. Optical Instruments, 2012, 34(5): 5.