中国激光, 2020, 47 (4): 0410002, 网络出版: 2020-04-09
泰曼-格林干涉型衍射光栅位移传感器 下载: 1151次
Diffraction Grating Displacement Sensor Based on Twyman-Green Interference
图 & 表
图 1. 衍射光栅位移测量原理示意图
Fig. 1. Schematic of principle of diffracted-grating displacement measurement
图 2. 前三级衍射光强随位移d的变化
Fig. 2. Variation of normalized diffraction intensity of the first three orders with displacement d
图 4. 反正切算法的Simulink仿真。(a)反正切算法的Simulink建模;(b)正/余弦函数的Simulink仿真结果;(c)取绝对值的Simulink仿真结果;(d)正切函数的Simulink仿真结果;(e)反正切函数的Simulink仿真结果
Fig. 4. Arctangent algorithm Simulink simulation. (a) Modeling of arctangent algorithm in Simulink; (b) Simulink simulation of sine/cosine function; (c) Simulink simulation of absolute value; (d) Simulink simulation of tangent function; (e) Simulink simulation of arctangent function
图 5. 偏置误差对反正切的影响。(a)无偏置误差与存在1%偏置误差条件下反正切值仿真结果的对比; (b) 1%偏置误差下产生的反正切误差
Fig. 5. Effect of offset error on arctangent. (a) Comparison of arctangent value of without offset error and with 1% offset error; (b) arctangent error value with 1% offset error
图 6. 验证分辨率实验装置图(L:激光器;PL:偏振片;PI:P-611线性压电陶瓷定位系统;IC:插值细分电路)
Fig. 6. Experimental setup of resolution verification (L:laser; PL: polarized light polariscope; PI: P-611 linear piezoelectric ceramic positioning system; IC: interpolation circuit)
梁洲鑫, 李孟委, 张瑞, 金丽, 辛晨光, 解琨阳, 赵宏波. 泰曼-格林干涉型衍射光栅位移传感器[J]. 中国激光, 2020, 47(4): 0410002. Liang Zhouxin, Li Mengwei, Zhang Rui, Jin Li, Xin Chenguang, Xie Kunyang, Zhao Hongbo. Diffraction Grating Displacement Sensor Based on Twyman-Green Interference[J]. Chinese Journal of Lasers, 2020, 47(4): 0410002.