应用CVD金刚石涂层工具研磨单晶蓝宝石
卢文壮, 杨斌, 冯伟, 杨旭, 蔡文俊. 应用CVD金刚石涂层工具研磨单晶蓝宝石[J]. 光学 精密工程, 2016, 24(3): 540.
LU Wen-zhuang, YANG Bin, FENG Wei, YANG Xu, CAI Wen-jun. Lapping of sapphire wafers by CVD diamond coated tools[J]. Optics and Precision Engineering, 2016, 24(3): 540.
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卢文壮, 杨斌, 冯伟, 杨旭, 蔡文俊. 应用CVD金刚石涂层工具研磨单晶蓝宝石[J]. 光学 精密工程, 2016, 24(3): 540. LU Wen-zhuang, YANG Bin, FENG Wei, YANG Xu, CAI Wen-jun. Lapping of sapphire wafers by CVD diamond coated tools[J]. Optics and Precision Engineering, 2016, 24(3): 540.