光学 精密工程, 2016, 24 (3): 540, 网络出版: 2016-04-13   

应用CVD金刚石涂层工具研磨单晶蓝宝石

Lapping of sapphire wafers by CVD diamond coated tools
作者单位
1 南京航空航天大学 机电学院, 江苏 南京 210016
2 江苏省精密与微细制造技术重点实验室, 江苏 南京 210016
引用该论文

卢文壮, 杨斌, 冯伟, 杨旭, 蔡文俊. 应用CVD金刚石涂层工具研磨单晶蓝宝石[J]. 光学 精密工程, 2016, 24(3): 540.

LU Wen-zhuang, YANG Bin, FENG Wei, YANG Xu, CAI Wen-jun. Lapping of sapphire wafers by CVD diamond coated tools[J]. Optics and Precision Engineering, 2016, 24(3): 540.

参考文献

[1] 周海. 蓝宝石加工工艺的研究[J]. 机械设计与制造工程, 2000, 29(1): 49-50.

    ZHOU H. Research on the processing technology of sapphire[J]. Machine Design and Manufacturing Engineering, 2000, 29(1): 49-50. (in Chinese)

[2] 卢文壮. CVD金刚石涂层刀具的制备及其切削性能研究[D]. 南京航空航天大学, 2008.

    LU W ZH. Deposition Techniques and Dry Machining Properties of CVD Diamond Coated Cutting Tool on WC-Co Cemented Carbide[D]. Nanjing University of Aeronautics and Astronautics, 2008.(in Chinese)

[3] 王浩, 卢文壮, 薛海鹏, 等. 渗硼高速钢表面CVD金刚石膜制备研究[J]. 人工晶体学报, 2013, 42(4): 572-576.

    WANG H, LU W ZH, XUE H P et al.. Preparation of CVD diamond film on borided high speed steel[J]. Journal of Synthetic Crystals, 2013, 42(4): 572-576. (in Chinese)

[4] SCHMITT M, PAULMIER D, LE HUU T. Tribological behavior of oriented diamond coating/steel couples under various environments[J]. Surface and Coatings Technology, 1999, 120: 585-588.

[5] SCHADE A, ROSIWAL S M, SINGER R F. Tribological behavior of< 100> and< 111> fiber textured CVD diamond films under dry planar sliding contact[J]. Diamond and related materials, 2006, 15(10): 1682-1688.

[6] LEI X, SHEN B, CHEN S, et al. Tribological behavior between micro-and nano-crystalline diamond films under dry sliding and water lubrication[J]. Tribology International, 2014, 69: 118-127.

[7] ERDEMIR A, FENSKE G R, KRAUSS A R, et al. Tribological properties of nanocrystalline diamond films[J]. Surface and Coatings Technology, 1999, 120: 565-572.

[8] B GLI U, BLATTER A, PIMENOV S M, et al. Tribological properties of smooth polycrystalline diamond films[J]. Diamond and related materials, 1995, 4(7): 1009-1019.

[9] LUO S Y, KUO J K, YEH B, et al. The tribology of nano-crystalline diamond[J]. Materials and physics, 2001, 72(2): 133-135.

[10] 朱永伟, 王成, 徐俊等. 固结磨料研磨垫孔隙结构对其加工性能的影响[J]. 光学 精密工程, 2014, 22(4): 911-917.

    ZHU Y W, WANG CH, XU J et al. Influence of pore distribution of fixed abrasive pad on its machining performance[J]. Optics and Precision Engineering, 2014, 22(4): 911-917. (in Chinese)

[11] 王建彬, 朱永伟, 谢春祥, 等. 固结磨料研磨蓝宝石单晶过程中研磨液的作用[J]. 光学 精密工程, 2014, 22(11): 3004-3011.

    WANG J B, ZHU Y W, XIE CH X, et al. Role of slurry in single crystal sapphire lapping with fixed abrasive pad[J]. Optics and Precision Engineering, 2014, 22(11): 3004-3011.

[12] 史兴宽, 滕霖, 李雅卿等. 硬脆材料延性域磨削的临界条件[J]. 航空精密制造技术, 1996, 32(4): 10-13.

    SHI X K, TENG L, LI Y Q et al. Critical condition for ductile domain grinding of hard brittle materials[J]. Aviation Precision Manufacturing Technology, 1996, 32(4): 10-13.

[13] 张克华. 基于半固着磨具的蓝宝石延性域加工基础研究[D]. 浙江工业大学, 2009.

    ZHANG K H. Fundamental Study on the Processing of Sapphire’s Ductile Regime Based on the Semi-Fixed Abrasive Plate[D]. Zhejiang University Of Technology, 2009.

卢文壮, 杨斌, 冯伟, 杨旭, 蔡文俊. 应用CVD金刚石涂层工具研磨单晶蓝宝石[J]. 光学 精密工程, 2016, 24(3): 540. LU Wen-zhuang, YANG Bin, FENG Wei, YANG Xu, CAI Wen-jun. Lapping of sapphire wafers by CVD diamond coated tools[J]. Optics and Precision Engineering, 2016, 24(3): 540.

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