红外与激光工程, 2019, 48 (11): 1113003, 网络出版: 2019-12-09   

超光滑表面缺陷的分类检测研究

Study on classification and detection of supersmooth surface defects
作者单位
1 西安工业大学 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710021
2 中国兵器科学院宁波分院, 浙江 宁波 310022
引用该论文

解格飒, 王红军, 王大森, 田爱玲, 刘丙才, 朱学亮, 刘卫国. 超光滑表面缺陷的分类检测研究[J]. 红外与激光工程, 2019, 48(11): 1113003.

Xie Gesa, Wang Hongjun, Wang Dasen, Tian Ailing, Liu Bingcai, Zhu Xueliang, Liu Weiguo. Study on classification and detection of supersmooth surface defects[J]. Infrared and Laser Engineering, 2019, 48(11): 1113003.

参考文献

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[2] Meng K. Material removal mechanism and experimental research for loose abrasive super-smoothing polishing[D]. Beijing:University of Chinese Academy of Sciences, 2017. (in Chinese)

[3] You Xinghai, Zhang Bin. Influence of optical component quality on signal to noise ratio in infrared optical systems[J].Infrared and laser Engineering, 2018, 47(3): 0320004. (in Chinese)

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[5] Singh U, Kapoor A. Single layer homogeneous model for surface roughness by polarized light scattering[J]. Optics & Laser Technology, 2008, 40(2): 3415-3424.

[6] Kurashov V N, Marienko V V, Molebna T V, et al.Polarization changes in coherent electromagnetic radiation scattering by the rough surface[C]//SPIE, 1995, 2647: 48-56.

[7] Gong Lei. Study on the composite light scattering from wafer and defect particles and its application[D]. Xi′an: Xidian University, 2011. (in Chinese)

[8] Gao Ming, Song Chong, Gong Lei. Analysis of polarization characteristic about rough surface light scattering based on polarized bidirectional reflectance distribution function[J]. Chinese Journal of Lasers, 2013, 40(12): 231-236. (in Chinese)

[9] Zhang Yanjie, Wang Xia, He Si. Polarized properties of rough surfaces based on polarized Bi-directional reflectance distribution function[J]. Acta Optica Sinica, 2018, 38(3): 441-447. (in Chinese)

[10] Sung L, Mulholl G W, Germer T A. Polarization of light scattered by spheres on a dielectric film[C]//SPIE, 1999, 3784: 296-303.

[11] Zhang Yingge. Study on optical scattering characteristics of surface microstructure for optical elements[D]. Xi′an: Xi′an Technological University, 2017. (in Chinese)

[12] Yuan Yan, Jin Ding, Su Lijuan. Optimization modeling and verfication of bidirectional reflectance distribution function for rough surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 402-408. (in Chinese)

[13] Pan Yongqiang. Light scattering properties and characteristics of multilayer optical thin films with microroughness [D].Xi′an: Xidian University, 2009. (in Chinese)

[14] Su Sen. Large optical component surface defects detection[D]. Chengdu: Southwest University of Science and Technology, 2014. (in Chinese)

[15] Zhang Jianhua.The research on the relevant electromagnetic scattering of random rough surface[D]. Wuhan: Huazhong University of Science and Technology, 2012. (in Chinese)

解格飒, 王红军, 王大森, 田爱玲, 刘丙才, 朱学亮, 刘卫国. 超光滑表面缺陷的分类检测研究[J]. 红外与激光工程, 2019, 48(11): 1113003. Xie Gesa, Wang Hongjun, Wang Dasen, Tian Ailing, Liu Bingcai, Zhu Xueliang, Liu Weiguo. Study on classification and detection of supersmooth surface defects[J]. Infrared and Laser Engineering, 2019, 48(11): 1113003.

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