Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films

HAN Chunlong; LI Juan

doi:doi:1007-0206(2010)04-0137-04

半导体光子学与技术, 2010, 16 (4): 137, 网络出版: 2011-07-27

Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films

HAN Chunlong ^1,*LI Juan ²

作者单位

¹ Zhong Huan System Engineering Co., Ltd, Tianjin 300060， CHN

² Institute of Photo-electronics, Nankai University, Tianjin 300071, CHN

基本信息

DOI:	1007-0206(2010)04-0137-04
中图分类号:	O433.1
栏目:
项目基金:	--
收稿日期:	2010-09-25
修改稿日期:	2010-12-20
网络出版日期:	2011-07-27
通讯作者:	HAN Chunlong (Lj1018@nankai.edu.cn)
备注:	--

HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. 半导体光子学与技术, 2010, 16(4): 137. HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. Semiconductor Photonics and Technology, 2010, 16(4): 137.