Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films
HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. 半导体光子学与技术, 2010, 16(4): 137.
HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. Semiconductor Photonics and Technology, 2010, 16(4): 137.
[1] Chen Yong-sheng, Wang Jian-hua, Lu Jing-xiao, et al. The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells[J]. Chinese Physics B, 2008,17(9): 3464.
[2] Schropp REI, Stannowski B, Rath J K. New challenges in thin film transistor (TFT) research[J]. Journal of Non Crystalline Solids, 2009: 1304-1310.
[3] Qiu Sheng-hua, Chen Cheng-zhao, Liu Cui-qing, et al. Effect of hydrogen dilution on crystalline properties of nanocrystalline silicon thin films in fast growth[J]. Acta Physica Sinica, 2009, 58 (1): 565-569.
[4] Unold T, Bruggemann R, Kleider J P, et al. Anisotropy in the transport of microcrystalline silicon[J]. Journal of Non-Crystalline Solids, 2000, Part A: 325-330.
[5] Li Juan, Zhao Shuyun, Liu jianping, et al. A VHF PECVD Micro-crystalline silicon bottom gate tft with a thin incubation layer[J]. Chinese Journal of Semiconductors, 2005, 26 (6): 1121-1125.
[6] Wyrsch N, Droz C, Feitknecht L, et al. Effect of the microstructure on the electronic transport In hydrogenated microcrystalline silicon[J]. Journal of Non-Crystalline Solids, 2002: 299-302, 390-394.
[7] Kocka J, Stuchlikovaa H, Stuchlik J, et al. Model of transport in microcrystalline silicon [J]. Journal of Non-Crystalline Solids, 2002(299-302): 355-359.
[8] Torres P, Meier J, Fluckiger R, et al. Device grade microcrystalline silicon owing to reduced oxygen contamination [J]. Appl. Phys. Lett.,1996,69(10): 1373-1375.
HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. 半导体光子学与技术, 2010, 16(4): 137. HAN Chunlong, LI Juan. Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films[J]. Semiconductor Photonics and Technology, 2010, 16(4): 137.