蓝宝石/SiO2/AlN/GaN多层结构表面热应力仿真分析
陈靖, 程宏昌, 吴玲玲, 冯刘, 苗壮. 蓝宝石/SiO2/AlN/GaN多层结构表面热应力仿真分析[J]. 红外技术, 2017, 39(5): 463.
CHEN Jing, CEHNG Hongchang, WU Lingling, FENG Liu, MIAO Zhuang. Thermal Stress Analysis of Surface of Sapphire/SiO2/AlN/GaN Epilayers[J]. Infrared Technology, 2017, 39(5): 463.
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陈靖, 程宏昌, 吴玲玲, 冯刘, 苗壮. 蓝宝石/SiO2/AlN/GaN多层结构表面热应力仿真分析[J]. 红外技术, 2017, 39(5): 463. CHEN Jing, CEHNG Hongchang, WU Lingling, FENG Liu, MIAO Zhuang. Thermal Stress Analysis of Surface of Sapphire/SiO2/AlN/GaN Epilayers[J]. Infrared Technology, 2017, 39(5): 463.
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