激光与光电子学进展, 2019, 56 (9): 090004, 网络出版: 2019-07-05
全电介质纳米颗粒的制造及其应用 
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Fabrication and Application of All-Dielectric Nanoparticles
图 & 表
图 1. 全电介质纳米颗粒中激发的磁偶极矩示意图[35]
Fig. 1. Schematic of magnetic-dipole moment excited in all-dielectric nanoparticles[35]
图 2. 室温下晶体硅的光谱依赖特性[36]。(a)折射率实部和虚部;(b)电导电流和位移电流的比率
Fig. 2. Spectral dependence properties of crystalline silicon at room temperature[36]. (a) Real and imaginary parts of refractive index; (b) ratio between electrical conduction current and displacement current
图 3. 不同条件下的纳米颗粒内的电场分布[37]。(a) MD共振;(b) ED共振
Fig. 3. Electric field distributions in nanoparticles under different conditions. (a) MD resonance; (b) ED resonance
图 4. 通过光刻技术制备的高折射率电介质纳米颗粒的扫描电子显微镜(SEM)图。(a)空心Si圆柱 [38];(b)利用基于掩模的反应离子蚀刻获得的Si纳米颗粒[39];(c) Si纳米颗粒和另外沉积的Si3N4薄膜[40]
Fig. 4. Examples of high-index dielectric nanoparticles fabricated by lithography. (a) Scanning electron microscopy (SEM) image of hollow Si cylinder[38]; (b) Si nanoparticles obtained by means of reactive-ion-etching based on mask[39]; (c) Si nanoparticles with additionally deposited Si3N4 thin film[40]
图 5. Si胶体及Si纳米颗粒的SEM图。(a) Si胶体的高倍放大SEM图像[41];(b)通过化学沉积获得的自对准Si纳米颗粒 [43]
Fig. 5. SEM images of Si colloids and Si nanoparticles. (a) High-magnification SEM images of silicon colloids [41]; (b) self-aligned silicon nanoparticles obtained by chemical deposition[43]
图 6. Si纳米颗粒的暗场光学图及SiGe纳米颗粒的原子力显微镜(AFM)图。(a)通过薄膜去湿法刻蚀获得的Si纳米颗粒的暗场光学图 [44];(b)热去湿后接收阵列中的SiGe纳米颗粒的AFM图[46]
Fig. 6. Dark-field optical image of Si nanoparticles and atomic force microscope (AFM) image of SiGe nanoparticles. (a) Dark-field optical image of Si nanoparticles obtained by thin film dewetting[44]; (b) AFM image of SiGe nanoparticles in array received after thermal dewetting[46]
图 7. 通过激光烧蚀方法制造的高折射率电介质纳米颗粒的实例。(a)通过飞秒激光烧蚀体硅获得的Si纳米颗粒的暗场光学图[47];(b) ZnO亚微球的透射电子显微镜(TEM)图[48];(c) CdSe亚微球的TEM图[48]
Fig. 7. Examples of high-index dielectric nanoparticles fabricated by laser ablation method. (a) Dark-field optical image of silicon nanoparticle obtained via femtosecond laser ablation of bulk silicon[47]; (b) transmission electron microscope (TEM) image of ZnO submicrosphere[48]; (c) TEM image of CdSe submicrosphere[48]
图 8. 通过LIT方法制备的Si纳米颗粒的暗视野显微图[50]。(a)通过LIT方法制获得的非晶Si纳米颗粒阵列;(b)通过飞秒激光打印的Si纳米颗粒
Fig. 8. Examples of silicon nanoparticles fabricated by LIT method[50]. (a) Array of amorphous Si nanoparticles fabricated by LIT method and visualized with dark-field microscopy; (b) femtosecond laser printed Si nanoparticles
图 9. 高折射率半导体材料纳米谐振器的共振特性。(a)高折射率电介质组成的立方形,球形或盘形谐振器[52];(b)有效的负磁导率μeff和有效的负介电常数εeff52;(c)在电或磁共振附近,高折射率碲谐振器的二维阵列的反射和透射光谱[21]
Fig. 9. Resonant characteristics of nano-resonators with high index semiconductor materials. (a) Cubic, spherical or disc-shaped resonators composed of high-index dielectric[52]; (b) effective negative magnetic permeability μeff and e?ective negative dielectric permittivity εeff52; (c) reflection and transmission spectra of two-dimensional arrays of tellurium resonators near electric or magnetic resonance[21]
图 10. 两种类型的全电介质纳米天线方向性的波长依赖性[67]。(a)单个电介质纳米颗粒;(b)分离距离D=70 nm时Yagi-Uda型结构
Fig. 10. Wavelength dependence of directivity of two types of all-dielectric nano-antennas[67]. (a) Single dielectric nanoparticle; (b) Yagi-Uda-type structure when separation distance D is 70 nm
图 11. 455 nm波长处超指向硅天线最大方向性与偶极源位置的依赖关系[68]
Fig. 11. Maximum directivity of super-directive nano-antenna versus position of dipole source at wavelength of 455 nm[68]
图 12. 几种常见超材料结构。(a)(b)基于球形和圆柱形颗粒的全电介质超材料[77];(c)~(f)全电介质超表面[78,57,40]
Fig. 12. Several common metamaterial structures. (a)(b) All-dielectric metamaterial based on spherical and cylindrical particles[77] ; (c)-(f) all-dielectric metasurfaces[78,57,40]
图 13. Si纳米盘阵列的三次谐波(THG)光谱及Si纳米天线方向性。(a)纳米盘阵列的THG光谱(紫点)及线性透射光谱(灰色区域)[26];(b)通过光激发动态重构Si纳米天线方向性(两个插图显示了具有最大强度的入射光束的散射图)[29]
Fig. 13. Spectrum for third harmonic generation (THG) of Si nanodisk array and directionality of Si nano-antenna. (a) THG spectrum of nanodisk array(purple dots)and linear transmission spectrum (gray area) [26]; (b)dynamical reconfiguration of Si nano-antenna directivity via photoexcitation, and scattering diagrams of incident beam at largest intensity shown in two insets[29]
马浩, 赵元安, 邵建达. 全电介质纳米颗粒的制造及其应用[J]. 激光与光电子学进展, 2019, 56(9): 090004. Hao Ma, Yuanan Zhao, Jianda Shao. Fabrication and Application of All-Dielectric Nanoparticles[J]. Laser & Optoelectronics Progress, 2019, 56(9): 090004.
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