GaN缓冲层对直流反应磁控溅射AlN薄膜的影响
王新建, 宋航, 黎大兵, 蒋红, 李志明, 缪国庆, 陈一仁, 孙晓娟. GaN缓冲层对直流反应磁控溅射AlN薄膜的影响[J]. 发光学报, 2012, 33(10): 1089.
WANG Xin-jian, SONG Hang, LI Da-bing, JIANG Hong, LI Zhi-ming, MIAO Guo-qing, CHEN Yi-ren, SUN Xiao-juan. Effect of GaN Buffer Layers on Deposition of AlN Films by DC Reactive Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2012, 33(10): 1089.
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王新建, 宋航, 黎大兵, 蒋红, 李志明, 缪国庆, 陈一仁, 孙晓娟. GaN缓冲层对直流反应磁控溅射AlN薄膜的影响[J]. 发光学报, 2012, 33(10): 1089. WANG Xin-jian, SONG Hang, LI Da-bing, JIANG Hong, LI Zhi-ming, MIAO Guo-qing, CHEN Yi-ren, SUN Xiao-juan. Effect of GaN Buffer Layers on Deposition of AlN Films by DC Reactive Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2012, 33(10): 1089.