发光学报, 2012, 33 (10): 1089, 网络出版: 2012-10-12
GaN缓冲层对直流反应磁控溅射AlN薄膜的影响
Effect of GaN Buffer Layers on Deposition of AlN Films by DC Reactive Magnetron Sputtering
图 & 表
王新建, 宋航, 黎大兵, 蒋红, 李志明, 缪国庆, 陈一仁, 孙晓娟. GaN缓冲层对直流反应磁控溅射AlN薄膜的影响[J]. 发光学报, 2012, 33(10): 1089. WANG Xin-jian, SONG Hang, LI Da-bing, JIANG Hong, LI Zhi-ming, MIAO Guo-qing, CHEN Yi-ren, SUN Xiao-juan. Effect of GaN Buffer Layers on Deposition of AlN Films by DC Reactive Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2012, 33(10): 1089.