[1] 姚汉民, 胡松, 邢廷文.光学投影曝光微纳加工技术［M］.北京: 北京工业大学出版社, 2006: 61~81.

[2] ZHOU Shao-lin, FU Yong-qi, TANG Xiao-ping, et al. Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography［J］. Optics Express, 2008, 16(11): 7869-7880.

[3] 周绍林,唐小萍,胡松,等. 纳米光刻双光栅对准莫尔条纹分析［J］. 微细加工技术, 2008, 3: 13-17.

    ZHOU Shao-lin, TANG Xiao-ping, HU Song, et al. Analysis of Moire pattern of dual gratings alignment in nanometer lithography［J］. Microfabrication Technology, 2008, 3: 13-17.

[4] 周绍林, 杨勇, 陈旺富, 等. 基于双光栅的纳米测量方法［J］. 光学学报, 2009, 29(3): 702-706.

    ZHOU Shao-lin, YANG Yong, CHEN Wang-fu, et al. Dual-grating-based nanometer measurement［J］. Acta Optica Sinica, 2009, 29(3): 702-706.

[5] 徐锋, 胡松, 周绍林, 等.光刻对准中干涉条纹相位解析研究［J］. 光学学报, 2012, 32(2): 0212001: 1-6.

    XU Feng, HU Song, ZHOU Shao-lin, et al. Interference fringe pattern phase analysis in alignment of nano lithography［J］. Acta Optica Sinica, 2012, 32(2): 0212001: 1-6.

[6] 黄柏圣, 许家栋. 一种基于新质量图引导的干涉相位快速解缠方法［J］.系统仿真学报, 2010, 22(2): 528-531, 541.

    HUANG Bai-sheng, XU Jia-dong. Fast phase unwrapping method for interferometric phase based in new quality-guided［J］.Journal of System Simulation, 2010, 22(2): 528-531, 541.

[7] GHIGLIA D C, ROMERO L A. Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods［J］. Journal of Optical Society of America A, 1994, 11(1): 107-117.

[8] LU Yuan-gang, WANG Xiang-zhang, ZHANG Xu-ping. Weighted least-squares phase unwrapping algorithm based on derivative variance correlation map［J］. Optik, 2007, 118(2): 3627-3632.

[9] 张雄, 钱晓凡. 欠采样干涉图最小二乘相位解包裹算法改进［J］. 光子学报, 2011, 40(1): 121-125.

    ZHANG Xiong, QIAN Xiao-fan. An improvement on the Least-squares phase unwrapping algorithm for under sampled Interferogram［J］. Acta Photonica Sinicas, 2011, 40(1): 121-125.

[10] 钱晓凡,饶帆,李兴华,等. 精确最小二乘相位解包裹算法［J］.中国激光, 2012, 29(2): 0209001, 1-5.

    QIAN Xiao-fan, RAO Fan, LI Xing-hua, et al. Accurate Least-Squres phase unwrapping algorithm［J］. Chinese Journal of Laser, 2012, 29(2): 0209001, 1-5.

[11] QIAN Ke-mao, GAO Wen-jing, WANG Hai-xia. Windowed Fourier-filtered and quality-guided phase-unwrapping algorithm［J］. Applied Optics, 2008, 47(29): 5420-5428.

[12] LI Si-kun, CHEN Wen-jing, SU Xian-yu. Reliability-guided phase unwrapping in wavelet-transform profilometry［J］. Applied Optics, 2008, 47(18): 3369-3377.

[13] 崔海华,廖文和,程筱胜, 等. 相位展开算法中质量权值的数学描述与分析［J］.光学学报, 2010, 30(1): 90-104.

    CUI Hai-hua, LIAO Wen-he, CHENG Xiao-sheng, et al. Mathematic descriptions and analysis of quality weighting factors in phase unwrapping algorithms［J］. Acta Optica Sinica, 2010, 30(1): 90-104.

[14] 吴勇辉,程筱胜, 崔海华,等. 基于质量线导向的二维相位展开新方法［J］.中国激光, 2012, 39(3): 0308004, 1-6.

    WU Yong-hui, CHENG Xiao-sheng, CUI Hai-hua, et al. A novel method for 2D phase unwrapping guided by quality cut［J］. Chinese Journal of Laser, 2012, 39(3): 0308004, 1-6.

[15] LU Yuan-gang, ZHAO Wan-cheng, ZHANG Xu-ping, et al. Weighted-phase-gradient-based quality maps for two-dimensional quality-guided phase unwrapping［J］. Optics and Laser in Engineering, 2012, 50(10): 1397-1404.

[16] CHEN Ke, XI Jiang-tao, YU Yang-guang. Quality-guided spatial phase unwrapping algorithm for fast three-dimensional measurement［J］. Optics Communications, 2013, 294: 139-147.