单幅圆条纹相位展开光刻对准研究

针对光刻对准中产生的单幅封闭干涉条纹经相位解析后获得的包裹相位, 提出在极坐标系对其进行相位展开进而获得对准偏移量的方法.该方法首先将对准过程中两圆光栅相对移动产生条纹的相位分布从直角坐标系转换到极坐标系; 其次分析在极坐标系下对准偏移量与相位参量的关系; 最后通过取不同径向半径获得初始相位振幅与相位延迟进而求取对准偏移量.数值模拟与实验验证该方法的可行性并与传统的最小二乘与路径跟踪相位展开方法进行了对比分析.结果表明该方法对包裹相位进行展开进而达到几十纳米量级的高准确度对准, 具有很强的适应性.

Abstract

The phase unwrapping method based on the polar coordinate to get the alignment offset was proposed for the wrapped phase generated after the single closed interference fringe phase extraction in alignment of nanolithography. The phase distribution of the fringe pattern occurs in the relative movement between two circular gratings was transformed from rectangular coordinates system to polar coordinates system firstly; then the relationship between the alignment offset and the phase parameter was analysis in polar coordinates system; the initial phase amplitude and phase delay in different radial radius were got to acquire the alignment offset finally. The feasibility of the method was verified by numerical simulation and experiment and the comparisons of the tradition least squares method and path tracking method are given. The results show that the wrapped phase can be unwrapped for the alignment with high precision in tens of nanometers through the method with good adaptability.

参考文献

[1] 姚汉民, 胡松, 邢廷文.光学投影曝光微纳加工技术［M］.北京: 北京工业大学出版社, 2006: 61~81.

[2] ZHOU Shao-lin, FU Yong-qi, TANG Xiao-ping, et al. Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography［J］. Optics Express, 2008, 16(11): 7869-7880.

[3] 周绍林,唐小萍,胡松,等. 纳米光刻双光栅对准莫尔条纹分析［J］. 微细加工技术, 2008, 3: 13-17.

ZHOU Shao-lin, TANG Xiao-ping, HU Song, et al. Analysis of Moire pattern of dual gratings alignment in nanometer lithography［J］. Microfabrication Technology, 2008, 3: 13-17.

[4] 周绍林, 杨勇, 陈旺富, 等. 基于双光栅的纳米测量方法［J］. 光学学报, 2009, 29(3): 702-706.

ZHOU Shao-lin, YANG Yong, CHEN Wang-fu, et al. Dual-grating-based nanometer measurement［J］. Acta Optica Sinica, 2009, 29(3): 702-706.

[5] 徐锋, 胡松, 周绍林, 等.光刻对准中干涉条纹相位解析研究［J］. 光学学报, 2012, 32(2): 0212001: 1-6.

XU Feng, HU Song, ZHOU Shao-lin, et al. Interference fringe pattern phase analysis in alignment of nano lithography［J］. Acta Optica Sinica, 2012, 32(2): 0212001: 1-6.

[6] 黄柏圣, 许家栋. 一种基于新质量图引导的干涉相位快速解缠方法［J］.系统仿真学报, 2010, 22(2): 528-531, 541.

HUANG Bai-sheng, XU Jia-dong. Fast phase unwrapping method for interferometric phase based in new quality-guided［J］.Journal of System Simulation, 2010, 22(2): 528-531, 541.

[7] GHIGLIA D C, ROMERO L A. Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods［J］. Journal of Optical Society of America A, 1994, 11(1): 107-117.

[8] LU Yuan-gang, WANG Xiang-zhang, ZHANG Xu-ping. Weighted least-squares phase unwrapping algorithm based on derivative variance correlation map［J］. Optik, 2007, 118(2): 3627-3632.

[9] 张雄, 钱晓凡. 欠采样干涉图最小二乘相位解包裹算法改进［J］. 光子学报, 2011, 40(1): 121-125.

ZHANG Xiong, QIAN Xiao-fan. An improvement on the Least-squares phase unwrapping algorithm for under sampled Interferogram［J］. Acta Photonica Sinicas, 2011, 40(1): 121-125.

[10] 钱晓凡,饶帆,李兴华,等. 精确最小二乘相位解包裹算法［J］.中国激光, 2012, 29(2): 0209001, 1-5.

QIAN Xiao-fan, RAO Fan, LI Xing-hua, et al. Accurate Least-Squres phase unwrapping algorithm［J］. Chinese Journal of Laser, 2012, 29(2): 0209001, 1-5.

[11] QIAN Ke-mao, GAO Wen-jing, WANG Hai-xia. Windowed Fourier-filtered and quality-guided phase-unwrapping algorithm［J］. Applied Optics, 2008, 47(29): 5420-5428.

[12] LI Si-kun, CHEN Wen-jing, SU Xian-yu. Reliability-guided phase unwrapping in wavelet-transform profilometry［J］. Applied Optics, 2008, 47(18): 3369-3377.

[13] 崔海华,廖文和,程筱胜, 等. 相位展开算法中质量权值的数学描述与分析［J］.光学学报, 2010, 30(1): 90-104.

CUI Hai-hua, LIAO Wen-he, CHENG Xiao-sheng, et al. Mathematic descriptions and analysis of quality weighting factors in phase unwrapping algorithms［J］. Acta Optica Sinica, 2010, 30(1): 90-104.

[14] 吴勇辉,程筱胜, 崔海华,等. 基于质量线导向的二维相位展开新方法［J］.中国激光, 2012, 39(3): 0308004, 1-6.

WU Yong-hui, CHENG Xiao-sheng, CUI Hai-hua, et al. A novel method for 2D phase unwrapping guided by quality cut［J］. Chinese Journal of Laser, 2012, 39(3): 0308004, 1-6.

[15] LU Yuan-gang, ZHAO Wan-cheng, ZHANG Xu-ping, et al. Weighted-phase-gradient-based quality maps for two-dimensional quality-guided phase unwrapping［J］. Optics and Laser in Engineering, 2012, 50(10): 1397-1404.

[16] CHEN Ke, XI Jiang-tao, YU Yang-guang. Quality-guided spatial phase unwrapping algorithm for fast three-dimensional measurement［J］. Optics Communications, 2013, 294: 139-147.

徐锋, 胡松. 单幅圆条纹相位展开光刻对准研究[J]. 光子学报, 2014, 43(11): 1112002. XU Feng, HU Song. Alignment in Lithography with Single Circular Fringe Pattern Phase Unwrapping[J]. ACTA PHOTONICA SINICA, 2014, 43(11): 1112002.

单幅圆条纹相位展开光刻对准研究

关于本站 Cookie 的使用提示

全站搜索

单幅圆条纹相位展开光刻对准研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索