中国激光, 2017, 44 (1): 0102008, 网络出版: 2017-01-10
基于空间光调制器的能量可控飞秒激光加工 
下载： 1507次
Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator
图 & 表
图 3. 闪耀光栅全息图。(a)(b)不同周期;(c)(d)不同挖空区域
Fig. 3. Holograms of blazed gratings. (a)(b) Blazed grating with different periods; (c)(d) blazed grating with different active zones
图 4. 采用计算全息图控制加工结构的扫描电子显微镜图。(a)(b)(c)对应的闪耀光栅周期分别为540,1080,2160 pixel;(d)(e)加工过程中不控制能量和实时控制能量得到的加工结果
Fig. 4. SEM images of microstructures fabricated with computer generated holograms. (a)(b)(c) Corresponding to the blazed grating periods of 540 pixel, 1080 pixel and 2160 pixel; results fabricated (d) without energy control and (e) with real-time energy control
图 5. 环状结构设计目标图与加工结构显微镜图。(a)目标结构灰度图与不同a值的理论示意图;(b)(c)(d)观测平面离基底分别为0,1,2 mm
Fig. 5. Schematic and microscopic images of annular microstructures fabricated with real-time energy control. (a) Schematic of annular structures fabricated with different a values; (b)(c)(d) microscopic images captured at focal plane, focal plane 1 mm to the focal plane and 2 mm to the focal plane, respectively
饶生龙, 吴培超, 张晨初, 胡衍雷, 杨亮, 劳召欣, 吴东. 基于空间光调制器的能量可控飞秒激光加工[J]. 中国激光, 2017, 44(1): 0102008. Rao Shenglong, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, Wu Dong. Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2017, 44(1): 0102008.
PDF全文
