拉通型硅基APD保护环工艺研究
李睿智, 袁安波, 曾武贤. 拉通型硅基APD保护环工艺研究[J]. 半导体光电, 2017, 38(3): 361.
LI Ruizhi, YUAN Anbo, ZENG Wuxian. Study on Guard-ring Process of Silicon Reach-through APD[J]. Semiconductor Optoelectronics, 2017, 38(3): 361.
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李睿智, 袁安波, 曾武贤. 拉通型硅基APD保护环工艺研究[J]. 半导体光电, 2017, 38(3): 361. LI Ruizhi, YUAN Anbo, ZENG Wuxian. Study on Guard-ring Process of Silicon Reach-through APD[J]. Semiconductor Optoelectronics, 2017, 38(3): 361.
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