低能离子束诱导蓝宝石自组织纳米结构与光学性能研究

针对蓝宝石有序纳米结构的制备，使用微波回旋共振离子源，研究了低能Ar+离子束在不同参数下刻蚀蓝宝石(C 向)表面形成的自组织纳米结构及其光学性能。结果表明，当离子束入射能量为1200 eV、束流密度为265 μA/cm2 时，随着入射角度的增大(5°~40°)，样品表面出现点状自组织纳米结构，该结构的有序性较差；当增加角度到45°时，样品表面出现了有序的条纹结构，在45°~70°时，增大离子束入射角度，样品表面沿离子束入射方向出现柱状结构，而在垂直于离子束入射方向，样品表面呈现出有序的条纹结构；随着离子束入射角度的增加，样品表面的纳米条纹结构的特征波长先减小(45°~60°)后逐渐增大(60°~70°)，在60°附近，特征波长达到极小值，约为21.1 nm。在70°~75°时，样品表面呈现纵横比较大的纳米点状结构。增加离子束的作用时间，样品表面的纳米结构纵向尺寸增大，有序性增加，但纳米结构横向周期基本不变。有序纳米结构的出现使得样品的透射率得到提升。自组织结构变化是溅射粗糙化和表面驰豫机制相互作用的结果。

Abstract

Electron cyclotron resonance (ECR) ion source is employed to erode the surface of sapphire (crystal orientation C) and the eroding effects and optical properties beams are researched at different low energy Ar + ion-beam incident angles. The experimental results indicate that, with ion beam energy 1200 eV, and beam current density 265 μA/cm2 , the increase of incident angle (5° ~40° ) obtains dot patterns on the sample surfaces; when the incident angle continues to increase up to 45°, orderly ripple structures appear on sample surfaces; the increase of incident angle (45°~70°) achieves column structures on sample surfaces in the direction of incident angle and orderly ripple structures in the direction perpendicular to incident angle; with the increase of incident angle, ripple wavelength on the sample surface firstly decreases slightly (45°~60°) and then gradually enlarges (60° ~70° ); when the incident angle is within 70° ~75° , dot patterns with larger aspect ratio emerge on sample surfaces. Eroding time extension is unable to change nano-struture topographies, but able to increase the vertical nano-structure dimensions and enhance the orderliness. In addition, enhancement of surface orderliness and height of nano-structures results in the increase of transmittance, which accounts for sample surface antireflections. The transformation of self-organized nano-structure patterns result from the interaction of spurting roughness and relaxation mechanism.

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陈智利, 刘卫国, 杨利红. 低能离子束诱导蓝宝石自组织纳米结构与光学性能研究[J]. 中国激光, 2015, 42(3): 0306003. Chen Zhili, Liu Weiguo, Yang Lihong. Self-Organizing Nano-Structure and Optical Properties of Sapphire Induced by Low Energy Ion Beam[J]. Chinese Journal of Lasers, 2015, 42(3): 0306003.

低能离子束诱导蓝宝石自组织纳米结构与光学性能研究

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