弛豫铁电0.74Pb (Mg1/3Nb2/3)O3-0.26PbTiO3薄膜的微结构和光学性能

采用磁控溅射法，选用LaNi O3作为缓冲层，在硅基片上制备出了0.74Pb(Mg1/3 Nb2/3) O3-0.26PbTiO3弛豫铁电薄膜.研究了沉积温度对薄膜的微结构和光学性能的影响.其中，沉积温度为500 oC时制备的薄膜，不仅具有纯的钙钛矿结构，高度(110)择优取向、致密、无裂纹的形貌、而且具有最大的剩余极化，大小为17.2 μC/cm2.使用柯西模型进行拟合反射谱，分析得到薄膜的折射率和消光系数.在波长为633 nm时，500 oC沉积的薄膜的折射率大小为2.41.另外，薄膜的光学带隙在2.97～3.22 eV范围内.并初步讨论了这些薄膜的光学性能的差异.

Abstract

Relaxor ferroelectric 0.74Pb (Mg1/3 Nb2/3) O3-0.26PbTiO3 thin films were prepared on LaNiO3-buffered silicon substrates by radio-frequency magnetron sputtering. The effect of deposition temperature on films' microstructures and optical properties was investigated. The sample deposited at 500 oC exhibits not only a pure perovskite phase, highly (110)-preferred orientation, and dense and crack-free morphology, but also the largest average remnant polarization of 17.2 μC/cm2 among all investigated films. With Cauchy model the refractive indices and extinction coefficients for these specimens have been obtained by fitting experimental reflectance spectra. At a wavelength of 633 nm, the value of refractive index 2.41 was obtained for the thin films deposited at 500 oC. In addition, optical band gaps of the films are in the range of 2.97-3.22 eV. A preliminary discussion has been carried out on the difference in the optical properties of these films.

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田玥, 唐艳学, 周丹, 胡志娟, 王飞飞, 陈心满, 刘锋, 王涛, 谢东珠, 孙大志, 石旺舟, 胡古今, 孔伟金. 弛豫铁电0.74Pb (Mg_1/3Nb_2/3)O₃-0.26PbTiO₃薄膜的微结构和光学性能[J]. 红外与毫米波学报, 2012, 31(4): 289. TIAN Yue, TANG Yan-Xue, ZHOU Dan, HU Zhi-Juan, WANG Fei-Fei, CHEN Xin-Man, LIU Feng, WANG Tao, XIE Dong-Zhu, SUN Da-Zhi, SHI Wang-Zhou, HU Gu-Jin, KONG Wei- Jin. Microstructures and optical properties of relaxor ferroelectric 0.74Pb (Mg_1/3Nb_2/3)O₃-0.26PbTiO₃ thin films[J]. Journal of Infrared and Millimeter Waves, 2012, 31(4): 289.

弛豫铁电0.74Pb (Mg_1/3Nb_2/3)O₃-0.26PbTiO₃薄膜的微结构和光学性能

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