集成双光栅干涉微梁位移测量方法
冯金扬, 叶雄英, 陈烽, 商院芳. 集成双光栅干涉微梁位移测量方法[J]. 光学 精密工程, 2012, 20(8): 1747.
FENG Jin-yang, YE Xiong-ying, CHEN Feng, SHANG Yuan-fang. Interferometric displacement measurement of microcantilevers based on integrated dual gratings[J]. Optics and Precision Engineering, 2012, 20(8): 1747.
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冯金扬, 叶雄英, 陈烽, 商院芳. 集成双光栅干涉微梁位移测量方法[J]. 光学 精密工程, 2012, 20(8): 1747. FENG Jin-yang, YE Xiong-ying, CHEN Feng, SHANG Yuan-fang. Interferometric displacement measurement of microcantilevers based on integrated dual gratings[J]. Optics and Precision Engineering, 2012, 20(8): 1747.
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