光学学报, 2020, 40 (7): 0711003, 网络出版: 2020-04-15
大口径反射镜表面颗粒污染物暗场检测算法研究 下载: 1200次
A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors
图 & 表
图 7. 顶帽变换前后图像灰度分布对比。(a)原图灰度分布图;(b)顶帽变换结果灰度分布图
Fig. 7. Comparison before and after top hat transformation. (a) Grayscale map of original image; (b) grayscale map of transformation results
图 8. 自动聚焦曲线。(a)粗调过程Tenengrad函数曲线;(b)精调过程超声马达位置曲线;(c)精调过程子窗Tenengrad函数曲线
Fig. 8. Autofocus curve. (a) Tenengrad function curve of coarse adjustment; (b) focusing motor position curve of accurate adjustment; (c) sub-window Tenengrad function curve of accurate adjustment
图 9. 自动聚焦前后图像对比。(a)自动聚焦前图像;(b)自动聚焦后图像
Fig. 9. Image contrast before and after autofocusing. (a) Image before autofocusing; (b) image after autofocusing
图 10. 二值化算法对比。(a)原图;(b)Otsu算法;(c)最大熵算法;(d)均值算子加权自适应二值化;(e)拉普拉斯算子加权自适应二值化
Fig. 10. Binarization algorithm comparison. (a) Original image; (b) Otsu algorithm; (c) maximum entropy model; (d) mean weighted adaptive binarization algorithm; (e) Laplacian weighted adaptive binarization algorithm
表 1清晰度评价函数性能指标
Table1. Sharpness evaluation function performance indicators
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表 2污染物提取算法性能对比
Table2. Performance comparison of pollutant extraction algorithms
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尹朝阳, 张德志, 赵林杰, 陈明君, 程健, 蒋晓东, 苗心向, 牛龙飞. 大口径反射镜表面颗粒污染物暗场检测算法研究[J]. 光学学报, 2020, 40(7): 0711003. Zhaoyang Yin, Dezhi Zhang, Linjie Zhao, Mingjun Chen, Jian Cheng, Xiaodong Jiang, Xinxiang Miao, Longfei Niu. A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors[J]. Acta Optica Sinica, 2020, 40(7): 0711003.