光学学报, 2007, 27 (6): 1031, 网络出版: 2007-06-08   

光学元件表面缺陷的显微散射暗场成像及数字化评价系统

Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface
作者单位
1 浙江大学现代光学仪器国家重点实验室, 杭州 310027
2 中国工程物理研究院激光聚变研究中心, 绵阳 621000
引用该论文

杨甬英, 陆春华, 梁蛟, 刘东, 杨李茗, 李瑞洁. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统[J]. 光学学报, 2007, 27(6): 1031.

杨甬英, 陆春华, 梁蛟, 刘东, 杨李茗, 李瑞洁. Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface[J]. Acta Optica Sinica, 2007, 27(6): 1031.

参考文献

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杨甬英, 陆春华, 梁蛟, 刘东, 杨李茗, 李瑞洁. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统[J]. 光学学报, 2007, 27(6): 1031. 杨甬英, 陆春华, 梁蛟, 刘东, 杨李茗, 李瑞洁. Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface[J]. Acta Optica Sinica, 2007, 27(6): 1031.

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