部分补偿数字莫尔移相干涉的回程误差消除

张丽琼; 王劭溥; 胡摇; 郝群

doi:doi:10.3788/irla201847.0117005

红外与激光工程, 2018, 47 (1): 0117005, 网络出版: 2018-01-30

部分补偿数字莫尔移相干涉的回程误差消除

Retrace error elimination for partial compensation digital Moiré phase shifting interferometry

论文大纲

张丽琼 ^*王劭溥胡摇郝群

作者单位

北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室, 北京 100081

摘要

为了实现非球面面形误差的高精度测量, 研究了基于部分补偿原理的数字莫尔移相干涉技术中回程误差的消除方法。通过建立实际干涉仪和建模理想干涉仪, 并运用数字莫尔移相干涉技术, 获得实际干涉仪像面与被测非球面面形误差相关的波前; 分析了该测量系统的误差, 提出采用逆向优化法消除大面形误差时的回程误差实现被测非球面的面形误差检测。实验结果表明: 与轮廓仪结果比对, 面形误差较小时二分之一法重构面形误差, 峰谷值和均方根值分别优于λ/20, 面形误差较大时运用逆向优化法消除回程误差, 重构的非球面面形误差峰谷值和均方根值偏差均优于λ/5。基于逆向优化法的部分补偿数字莫尔移相干涉非球面检测, 有效消除了大面形误差时的回程误差, 可实现高精度的面形误差重构检测。

Abstract

A digital Moiré phase-shifting interferometry with partial compensation lens was expounded to test the figure error of aspheric surfaces with high accuracy measurement. The real interferometer and the ideal interferometer model were established to obtain the real and ideal wavefront at the image plane of the interferometer. Then the image wavefront in the real interferometer related to the surface figure error of the aspheric surface under test was obtained by using the digital Moiré phase-shifting technique. The error analysis of this measuring system was presented, and the reverse optimization procedure was applied to eliminate retrace error for the large figure error and reconstruct the test aspheric surface large figure error. Experimental results show that, compared to the profilometer, for the small figure error, the accuracy of the aspheric surface figure error measurement with the one-half method can achieve less than λ/20, both PV error and RMS error. For the large figure error, the reverse optimization method need to be used to obtain the accuracy of aspheric surface errors measurement of less than λ/5, both PV error and RMS error. Partial compensating digital Moiré phase shifting interferometry for the test aspheric surface error based on reverse optimization procedure can effectively correct the retrace error, and reconstruct the large figure error of aspheric surfaces with high-accuracy.

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张丽琼, 王劭溥, 胡摇, 郝群. 部分补偿数字莫尔移相干涉的回程误差消除[J]. 红外与激光工程, 2018, 47(1): 0117005. Zhang Liqiong, Wang Shaopu, Hu Yao, Hao Qun. Retrace error elimination for partial compensation digital Moiré phase shifting interferometry[J]. Infrared and Laser Engineering, 2018, 47(1): 0117005.

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