五角棱镜光学平行差的理论分析

王秋实; 李明; 廖可梁; 杨福桂; 盛伟繁

doi:doi:10.3788/gzxb20154405.0523006

光子学报, 2015, 44 (5): 0523006, 网络出版: 2015-05-26

五角棱镜光学平行差的理论分析

Theoretical Analysis on Optical Parallelism of Pentaprism

论文大纲

王秋实 ^*李明廖可梁杨福桂盛伟繁

作者单位

中国科学院高能物理研究所, X射线光学与技术实验室, 北京 100049

光学器件五角棱镜误差分析矩阵光学系统校准 Optical devices Pentaprism Tolerance analysis Matrix optics System calibration

摘要

利用矩阵光学方法, 计算得出五角棱镜两种光学平行差的解析表达式, 分析五角棱镜光学平行差与工作面法向矢量夹角的矩阵关系.基于Agilent激光干涉仪角度测量系统和DHC三维转台搭建实验装置, 测量了Thorlabs五角棱镜的两种光学平行差.实验和解析式计算结果偏离度不超过4%.五角棱镜滚动角、偏摆角的变化等效于五角棱镜光学平行差的变化.通过坐标系变换, 五角棱镜的自身误差和系统在线测量误差可以被同时标定.该研究对五角棱镜的实际加工、测量系统标定, 以及高准确度面形检测提供了参考.

Abstract

By using matrix optics method, expressions of two types of optical parallelism in pentaprism were obtained. An relationship between optical parallelism and normal vector of working surface was analysed. An experiment device based on Agilent laser interferometer and DHC 3D rotation platform was established. With angular measurement function provided by the device, optical parallelism of a pentaprism made by Thorlabs were measured. The experimental results are consisten with the calculation of analytical expressions, whose deviation is no more than 4%. Conclusion indicates that changes of roll angle and yaw angle in practical application are equivalent to alteration of optical parallelism. It means that the jitter errors of online measurement and fabrication errors can be in-situ calibrated simultaneously by coordinates transformation. The study is useful for manufacturing, adjusting and pre-calibrating a pentaprism in optical system, and the conclusions above can be a good help in high-precision optical surface profiler metrology in practice.

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王秋实, 李明, 廖可梁, 杨福桂, 盛伟繁. 五角棱镜光学平行差的理论分析[J]. 光子学报, 2015, 44(5): 0523006. WANG Qiu-shi, LI Ming, LIAO Ke-liang, YANG Fu-gui, SHENG Wei-fan. Theoretical Analysis on Optical Parallelism of Pentaprism[J]. ACTA PHOTONICA SINICA, 2015, 44(5): 0523006.

五角棱镜光学平行差的理论分析

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