[1] SABO M, KLAS M, WANG H, et al.. Positive corona discharge ion source with IMS/MS to detect, impurities in high purity Nitrogen ［J］. European Physical Journal Applied Physics, 2011, 55(1): 532-542.

[2] LIU X, LI SH L, LI M SH. Factors influencing the electron yield of needle-ring pulsed corona discharge electron source for negative Ion mobility spectrometer ［J］. Plasma Science & Technology, 2013, 15(12): 1215-1220.

[3] 栗大超, 李国卿, 檀景辉,等. 采用脉冲电晕放电离子源的离子迁移谱仪［J］. 光学 精密工程, 2013, 21(12): 3095-3101.

    LI D CH, LI G Q, TAN J H, et al.. Ion mobility spectrometer using pulse corona discharge ion source ［J］. Opt. Precision Eng., 2013, 21(12): 3095-3101. (in Chinese)

[4] 刘坤, 廖峥, 侯世英, 等. 大气压直流辉光放电装置的实验与分析［J］. 重庆大学学报,2013, 36(3): 71-76.

    LIU K, LIAO ZH, HOU SH Y, et al.. Experiment and analysis of an atmospheric DC glow discharge device ［J］. Journal of Chongqing University, 2013, 36(3): 71-76. (in Chinese)

[5] 唐飞, 王晓浩, 刘坤, 等. 敞开式小型线-筒电极负电晕放电离子源［J］. 光学 精密工程,2009, 17(8): 1953-1957.

    TANG F, WANG X H, LIU K, et al.. Ambient negative corona discharge ion source with small line-cylinder electrodes ［J］. Opt. Precision Eng., 2009, 17(8): 1953-1957.(in Chinese)

[6] LIU K, WANG X H, FEI T, et al.. Realization of atmospheric pressure glow discharge ion source in small gap with precise electrode structure［J］. Nami Jishu Yu Jingmi Gongcheng/nanotechnology & Precision Engineering, 2010, 8(3): 189-194.

[7] GUO CH A, TANG F, CHEN J, et al.. Development of dielectric barrier discharge ionization technique ［J］. Analytical and Bioanalytical Chemistry, 2015,407(9): 2345-2364.

[8] LI H, GUO CH Q, LI Y K, et al.. Effects of atmospheric-pressure discharge type on ionic wind velocity for needle-to-cylinder electrode ［J］. Journal of Vacuum Science & Technology A, 2016, 34: 031308-1-031308-8.

[9] 李华, 韦昌严, 曾德查, 等. 针-柱结构敞开式离子源和微型气泵集成系统的放电特性［J］. 光学 精密工程, 2014, 22(6): 1531-1537.

    LI H, WEI CH Y, ZENG D CH, et al.. Discharge properties of integrated system of ambient ion source and micro air pump based on needle-to-cylinder structure［J］. Opt. Precision Eng., 2014, 22(6): 1531-1537. (in Chinese)

[10] 李华,李玉凯,郭超群,等. 利用离子风实现后吸式进样与电离集成的离子源［J］. 光学 精密工程,2015,23(12): 3405-3413.

    LI H, LI Y K, GUO CH Q, et al.. Ion source with posterior suck sampling and ionization by ionic wind ［J］. Opt. Precision Eng., 2015, 23(12): 3405-3413. (in Chinese)

[11] 李华,李玉凯,郭超群,等. 采用离子风实现敞开式离子源和微型气泵集成系统的设计与实验［J］. 真空科学与技术学报,2015,35(9): 1112-1118.

    LI H, LI Y K, GUO CH Q, et al.. Integration of ion source and micro pump with ionic wind ［J］. Chinese Journal of Vacuum Science and Technology, 2015, 35(9): 1112-1118. (in Chinese)

[12] 郭超群,陈耀彬,李玉凯,等. 小间隙针-柱结构电晕放电和辉光放电实现离子风的特性［J］. 纳米技术与精密工程,2016,14(2): 112-117.

    GUO CH Q, CHEN Y B, LI Y K, et al.. Characteristics of ionic wind realized by corona discharge and glow discharge with a small gap needle-cylinder structure ［J］. Nanotechnology and Precision Engineering, 2016,14(2): 112-117. (in Chinese)

[13] 孔祥东, 张玉林, 宋会英. LIGA工艺的发展及应用［J］. 微纳电子技术, 2004, 41(5): 13-18.

    KONG X D, ZHANG Y L, SONG H Y. Development and application of LIGA technology［J］. Micronanoelectronic Technology, 2004, 41(5): 13-18. (in Chinese)

[14] 南雪莉, 张斌珍, 张少华,等. 基于UV-LIGA工艺的酸性电铸铜溶液最优化配比［J］. 科学技术与工程, 2014, 14(29): 265-270.

    NAN X L, ZHANG B ZH, ZHANG SH H, et al.. The optimal ratio of acid copper electroforming solution based on UV-LIGA process ［J］. Science Technology and Engineering, 2014, 14(29): 265-270. (in Chinese)

[15] LI H, WANG X H, TANG F, et al.. Separation of ions from volatile organic compounds using high-field asymmetric waveform ion mobility spectrometry-mass spectrometer ［J］. Chinese Journal of Chemical Physics, 2010, 23(2): 125-132.