敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析
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李华, 郭超群, 蒋林秀, 蒋永荣, 朱健铭, 肖文香, 韦宛伶, 陈真诚. 敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析[J]. 光学 精密工程, 2017, 25(6): 1567. LI Hua, GUO Chao-qun, JIANG Lin-xiu, JIANG Yong-rong, ZHU Jian-ming, XIAO Wen-xiang, WEI Wan-ling, CHEN Zhen-cheng. Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump[J]. Optics and Precision Engineering, 2017, 25(6): 1567.