激光与光电子学进展, 2020, 57 (18): 183201, 网络出版: 2020-09-02
飞秒激光烧蚀光斑灰度特征的小波处理与分析 
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Wavelet Processing and Analysis of Grayscale Features of Femtosecond Laser Ablation Spots
图 & 表
图 1. 不同烧蚀功率对应的光斑直径。(a)烧蚀的序列光斑;(b)关系曲线
Fig. 1. Spot diameter corresponding to different ablation power. (a) Ablated sequence spots; (b) relationship curve
图 2. 不同方法处理后的光斑图像。(a)原图像;(b)灰度变换方法;(c)直方图均衡化方法;(d) PCA方法
Fig. 2. Spot images processed by different methods. (a) Original image; (b) grayscale transformation method; (c) histogram equalization method; (d) PCA method
图 3. 伪彩色图像及其灰度化。(a)伪彩色图像;(b)灰度化图像
Fig. 3. Pseudo-color image and its graying. (a) Pseudo-color image; (b) grayscale image
图 4. L分量。(a)原图像的L分量;(b)掩模处理后的L分量
Fig. 4. L component. (a) L component of original image; (b) L component after mask processing
图 5. 原光斑图像及掩模处理后光斑图像L分量的平均灰度曲线。(a)原光斑图像;(b)掩模处理后的光斑图像
Fig. 5. Average gray curves of L component of original spot image and spot image after mask processing. (a) Original spot image; (b) spot image after mask processing
图 7. 分形插值处理前后的平均灰度特征曲线。(a)分形插值前;(b)分形插值后
Fig. 7. Average gray characteristic curves before and after fractal interpolation. (a) Before fractal interpolation; (b) after fractal interpolation
图 8. 分形插值与小波变换相结合处理得到的平均灰度特征曲线。(a)分形插值下;(b)分形插值结合小波变换下
Fig. 8. Average gray characteristic curves obtained by combining fractal interpolation with wavelet transformation. (a) With fractal interpolation; (b) combing fractal interpolation with wavelet transformation
图 9. 小波变换处理前后的平均灰度特征曲线。(a)小波变换前;(b)小波变换后
Fig. 9. Average gray characteristic curves before and after wavelet transformation. (a) Before wavelet transformation; (b) after wavelet transformation
图 11. 不同功率下光斑图像的平均灰度特征曲线
Fig. 11. Average gray characteristic curve of spot images under different power
表 1硅片微槽烧蚀实验参数
Table1. Ablation experimental parameters of silicon microchannels
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王福斌, 孙志林, 王尚政. 飞秒激光烧蚀光斑灰度特征的小波处理与分析[J]. 激光与光电子学进展, 2020, 57(18): 183201. Fubin Wang, Zhilin Sun, Shangzheng Wang. Wavelet Processing and Analysis of Grayscale Features of Femtosecond Laser Ablation Spots[J]. Laser & Optoelectronics Progress, 2020, 57(18): 183201.
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