光学与光电技术, 2017, 15 (5): 85, 网络出版: 2017-11-07   

制备工艺对ITO薄膜的光电特性影响研究

Optical and Electrical Properties of ITO Films by Process
作者单位
扬州乾照光电有限公司, 江苏 扬州 225101
引用该论文

肖和平, 王宇, 郭冠军. 制备工艺对ITO薄膜的光电特性影响研究[J]. 光学与光电技术, 2017, 15(5): 85.

XIAO He-ping, WANG Yu, GUO Guan-jun. Optical and Electrical Properties of ITO Films by Process[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2017, 15(5): 85.

参考文献

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[7] Klaus Ellmer, Rainald Mientus. Carrier transport in polycrystalline ITO and ZnO: Al II: The influence of grain barriers and boundaries[J].Thin Solid Films, 2008, 16 (17):5829-5835.

[8] 陈凯, 雷枫, 伊藤雅英. 白光干涉测量超薄透明电极ITO薄膜的厚度[J]. 中国光学, 2017, 8(4): :567-573.

    CHEN Kai, LEI Feng, YI Teng-yaying. Measurement of ITO transparent electrode film thickness with white-lightinterferometer[J]. Chinese Optics, 2017, 8(4):567-573.

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[12] 肖和平,郭冠军,马祥柱,等. 热退火处理对氧化铟锡薄膜光电特性的影响[J]. 激光与光电子学进展,2017,(1):311-316.

    XIAO He-ping , GUO Guan-jun, MA Xiang-zhu, et al. Influence of thermal annealing on photoelectrical properties of indium tin oxide thin films [J]. Laser & Optoelectronics Progress, 2017, (1): 311-316.

[13] HE Bo, WANG Hong-Zhi, LI Yao-gang, et al. Fabrication and characterization of amorphous ITO/p-Si heterojunction solar cell[J]. Science China,2013,56(08):1870-1876.

肖和平, 王宇, 郭冠军. 制备工艺对ITO薄膜的光电特性影响研究[J]. 光学与光电技术, 2017, 15(5): 85. XIAO He-ping, WANG Yu, GUO Guan-jun. Optical and Electrical Properties of ITO Films by Process[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2017, 15(5): 85.

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