用于光学位移传感器的新型数字编码光栅尺的制作
王宇, 陈火耀, 刘正坤, 郑衍畅, 洪义麟, 付绍军. 用于光学位移传感器的新型数字编码光栅尺的制作[J]. 光子学报, 2015, 44(4): 0405001.
WANG Yu, CHEN Huo-yao, LIU Zheng-kun, ZHENG Yan-chang, HONG Yi-lin, FU Shao-jun. Fabrication Process of a Novel Digital Encoding Grating Ruler for Optical Displacement Sensors[J]. ACTA PHOTONICA SINICA, 2015, 44(4): 0405001.
[1] FRITSCH K, BEHEIM G. Wavelength-division multiplexed digital optical position transducer［J］.Optics Letters, 1986, 11(1): 1-3.
[2] LIU Zheng-kun, XU Xiang-dong, ZHOU Qin, et al. Dual-reflector configuration in varied line-space grating displacement sensor［J］. Review of Scientific Instruments, 2008, 79(4): 046105-1-3.
[3] MANWELL J,BAILEY G. An optical displacement transducer for aerospace applications［J］. Sensors and Actuators A, 1989, 18(3-4): 233-237.
[4] MAGHOO M. A wavelength encoded rotary displacement fibersensor［J］. Measurement Science and Technology, 1994, 5: 260-266.
[5] LACLAIR R D, SPILLMAN JR W B, KUHNS W W. Long stroke optical fiber linear position sensor for the FLASH program［C］. SPIE, 1996, 2840: 137-141.
[6] ZHAO Li-xin, HU Song, WANG Zhao-zhi, et al. A novel fabrication of photoelectrical encoderby laser focus scanning fan-mask［J］. Microfabrication Technology, 2007, (6): 8-11.
[7] ZHANG Bing, ZHENG Pu-chao, ZHANG Chao, et al. A new type of displacement sensor test system based on Varied-line-space blazed grating［J］. Transducer and Microsystem Technologies, 2014, 33(5): 80-83.
王宇, 陈火耀, 刘正坤, 郑衍畅, 洪义麟, 付绍军. 用于光学位移传感器的新型数字编码光栅尺的制作[J]. 光子学报, 2015, 44(4): 0405001. WANG Yu, CHEN Huo-yao, LIU Zheng-kun, ZHENG Yan-chang, HONG Yi-lin, FU Shao-jun. Fabrication Process of a Novel Digital Encoding Grating Ruler for Optical Displacement Sensors[J]. ACTA PHOTONICA SINICA, 2015, 44(4): 0405001.
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