组合结构的中波红外带通滤光片研制

王航; 熊长新; 何光宗

光学与光电技术, 2015, 13 (4): 83, 网络出版: 2015-09-08

组合结构的中波红外带通滤光片研制

Design and Preparation of Medium-Wavelength Infrared Band Pass Combined Filter

论文大纲

王航 ^*熊长新何光宗

作者单位

华中光电技术研究所—武汉光电国家实验室, 湖北武汉 430223

文字间用号隔开空半格中波红外截止带长波通短波通电子束蒸发 medium-wave infrared rejection band long-wave pass short-wave pass electron beam evaporation

摘要

采用长短波通膜系组合结构,对膜系光学性能进行了优化设计以及仿真分析。采用电子束蒸发,离子束辅助沉积工艺在Si基底两面分别沉积长短通膜。样品的透过率采用红外光谱仪测试,在3.7~4.2 μm波段范围内平均透过率在80%以上,在3~3.6 μm和4.3~5 μm波段范围内截止,并将理论设计与实验结果进行了对比分析。样品通过了GJB2485-95规定的环境适应性测试。产品满足设计要求,具有工程化应用价值。

Abstract

In this paper, the combination structure of long-pass film stacks and short-pass film stacks are adopted, and the optical performance of film system is optimized, simulated and analyzed. Long-pass and short-pass films are deposited respectively on both sides of Si substrate by using electron beam evaporation and ion assisted deposition. The sample is investigated by FTIR spectrometer, which shows an average transmittance ratio is more than 80% at wavelength region 3.7~4.2 μm, and rejected at region 3 μm~3.6 μm and 4.3 μm~5 μm. The designed and experimented results are contrasted and analyzed. The sample passes the environment test according to GJB2485-95, which meets the requirement for the design and has application value for engineering.

参考文献

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王航, 熊长新, 何光宗. 组合结构的中波红外带通滤光片研制[J]. 光学与光电技术, 2015, 13(4): 83. WANG Hang, XIONG Chang-xin, HE Guang-zong. Design and Preparation of Medium-Wavelength Infrared Band Pass Combined Filter[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2015, 13(4): 83.

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