[1] 中华人民共和国国家质量监督检验检疫总局, 中国国家标准化管理委员会. 光学零件表面疵病: GB/T 1185-2006[S]. 北京: 中国标准出版社, 2006.

    General Administration of Quality Supervision, InspectionandQuarantine of the People’s Republic of China, StandardizationAdministration. Surface imperfections of optical elements: GB/T 1185-2006[S]. Beijing: Standard Press of China, 2006.

[2] 张博, 倪开灶, 王林军, 等. 基于背景校正和图像分割定量分析光学元件表面疵病的新算法[J]. 光学学报, 2016, 36(9): 0911004.

    Zhang B, Ni K Z, Wang L J, et al. New algorithm of detecting optical surface imperfection based on background correction and image segmentation[J]. Acta Optica Sinica, 2016, 36(9): 0911004.

[3] 缪洁, 李展, 崔子健, 等. 表面疵病动态彩色编码融合成像检测技术[J]. 光学学报, 2017, 37(9): 0912002.

    Miao J, Li Z, Cui Z J, et al. Dynamic spectral coding fusion imaging detection technique of surface defects[J]. Acta Optica Sinica, 2017, 37(9): 0912002.

[4] 罗茂, 步扬, 徐静浩, 等. 基于多光谱技术的光学元件表面疵病检测[J]. 中国激光, 2017, 44(1): 0104001.

    Luo M, Bu Y, Xu J H, et al. Optical element surface defect measurement based on multispectral technique[J]. Chinese Journal of Lasers, 2017, 44(1): 0104001.

[5] 赵文川, 钟显云, 刘彬, 等. 基于条纹反射的光学表面疵病检测法[J]. 光子学报, 2014, 43(9): 0912007.

    Zhao W C, Zhong X Y, Liu B, et al. The surface flaws inspection of optical components based on the fringe reflection[J]. Acta Photonica Sinica, 2014, 43(9): 0912007.

[6] 杨荟琦, 李显凌. 光学元件表面疵病检测仪的精度建模及预测[J]. 机械设计与制造, 2018( 6): 98- 101.

    Yang HQ, Li XL. Precision modeling and prediction of the defect detector for optical element surface[J]. Machinery Design & Manufacture, 2018( 6): 98- 101.

[7] Peterson G L. A BRDF model for scratches and digs[J]. Proceedings of SPIE, 2012, 8495: 84950G.

[8] Schröder S, Herffurth T, Duparré A, et al. Impact of surface roughness on the scatter losses and the scattering distribution of surfaces and thin film coatings[J]. Proceedings of SPIE, 2011, 8169: 81690R.

[9] The British StandardsInstitution. Optics and optical instruments-test methods for radiation scattered by optical components: ISO 13696: 2002[S]. Switzerland: International Organization for Standardization, 2002.

[10] BornM, WolfE. Principles of optics[M]. 7th ed. Cambridge: Cambridge University Press, 1999: 499- 503.

[11] Elson J M, Bennett J M, Stover J C. Wavelength and angular dependence of light scattering from beryllium: comparison of theory and experiment[J]. Applied Optics, 1993, 32(19): 3362-3376.

[12] Stover J C. Experimental confirmation of the Rayleigh-Rice obliquity factor[J]. Proceedings of SPIE, 2010, 7792: 77920J.

[13] Tribble A C, Boyadjian B, Davis J, et al. Contamination control engineering design guidelines for the aerospace community[J]. Proceedings of SPIE, 1996, 2864: 4-15.

[14] Dittman M G. Contamination scatter functions for stray-light analysis[J]. Proceedings of SPIE, 2002, 4774: 99-111.

[15] 杨甬英, 陆春华, 梁蛟, 等. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统[J]. 光学学报, 2007, 27(6): 1031-1038.

    Yang Y Y, Lu C H, Liang J, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica, 2007, 27(6): 1031-1038.