1 北京量子信息科学研究院 量子材料与器件研究部,北京 100193
2 中国科学院物理研究所 北京凝聚态物理国家实验室,北京 100190
3 中国科学院大学 物理学院,北京 100049
4 中国科学院半导体研究所 半导体材料科学重点实验室,北京 100083
作为一种新型半导体激光器,量子级联激光器因其独特的子带间跃迁机制,具有高速响应、高非线性、输出波长大范围可调等特点。近年来随着输出光功率和电光转化效率等性能指标的快速提升,量子级联激光器已成为中红外至太赫兹波段(波长约为3~300 μm)的主流激光光源,在大气污染监控、气体检测、太赫兹成像、生物医疗以及空间光通信等领域具有重要科学意义和应用价值。本文阐释了量子级联激光器的发展历程以及工作原理;分别重点讨论了中红外量子级联激光器在高效率、大功率、波长可调谐以及片上传感的应用等方面的研究进展,并对基于中红外量子级联激光器差频太赫兹光源和光频梳的发展进行叙述,最后进行了简要总结与展望。
量子级联激光器 片上传感 光频梳 太赫兹 Quantum cascade lasers On-chip sensing Optical frequency comb Terahertz 光子学报
2023, 52(10): 1052409
光子学报
2023, 52(10): 1052403
Author Affiliations
Abstract
1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Division of Quantum Materials and Devices, Beijing Academy of Quantum Information Sciences, Beijing 100193, China
We demonstrated an electrically pumped InP-based microcavity laser operating in continuous-wave mode. The active region is designed with antimony surfactants to enhance the gain at 2 μm, and a selective electrical isolation scheme is used to secure continuous-wave operation for the microcavity laser at room temperature. The lasers were fabricated as a notched elliptical resonator, resulting in a highly unidirectional far-field profile with an in-plane beam divergence of less than 2°. Single-mode emission was obtained over the entire dynamic range, and the laser frequencies were tuned linearly with the pumping current. Overall, these directional lasers pave the way for portable and highly integrated on-chip sensing applications.
whispering-gallery mode continuous-wave operation electrical isolation directional emission Chinese Optics Letters
2023, 21(4): 041405
Author Affiliations
Abstract
1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Beijing Academy of Quantum Information Sciences, Beijing 100193, China
We report on the design and fabrication of a dual-wavelength switchable quantum cascade laser (QCL) by optimizing the design of a homogeneous active region and combining superposed distributed feedback gratings. Coaxial, single-mode emissions at two different wavelengths were achieved only through adjusting the bias voltage. Room temperature continuous-wave operation with output powers of above 30 mW and 75 mW was realized for single-mode emission at 7.61 µm and 7.06 µm, respectively. The simplified fabrication process and easy wavelength control of our designed dual-wavelength QCL make it very attractive for developing miniature multi-species gas sensing systems.
quantum cascade laser dual-wavelength mid-infrared Chinese Optics Letters
2023, 21(1): 011408
1 中国科学院半导体研究所半导体材料科学重点实验室,北京 100083
2 中国科学院大学材料科学与光电技术学院,北京 100049
基于金属有机物化学气相沉积(MOCVD)技术实现了室温连续(CW)输出功率达到瓦级的中波红外量子级联激光器(QCL)。通过MOCVD生长条件优化,实现了高界面质量双声子共振结构材料生长,制备出室温CW功率最高为1.21 W的4.6 μm QCL。具体研究了基于生长的30和40级有源区材料所制备器件的性能,探究了不同级数对器件性能的影响。相比于30级有源区器件,40级有源区器件单位面积等效输出功率没有明显提升,但器件性能随温度的升高迅速下降,这归因于更加显著的热积累效应和外延材料变厚导致的质量恶化。因此,在通过增加有源区级数提升器件功率时,需要充分考虑有源级数、热积累和材料生长质量等因素之间的平衡。MOCVD是半导体材料产业界普遍采用的技术,本研究工作对于提升QCL材料制备效率、推进QCL技术产业化应用具有重要意义。
激光器 中红外 量子级联激光器 金属有机物化学气相沉积 高功率 连续输出 光学学报
2022, 42(22): 2214002
Author Affiliations
Abstract
1 Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Opto-Electronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Beijing Academy of Quantum Information Sciences, Beijing 100193, China
We demonstrate GaSb-based interband cascade lasers (ICLs) emitting around 3.65 µm, which exhibit a room-temperature continuous-wave (CW) output power above 100 mW. Cavity-length analysis showed that the laser structure has a low internal loss of while maintaining a total internal quantum efficiency greater than one. After 6400 h CW operation at 25°C, the threshold current of the laser increased by 3%, and the output power decreased by 7%, indicating good reliability of the device.
interband cascade lasers quantum well mid-infrared semiconductor lasers Chinese Optics Letters
2022, 20(2): 022501
光子学报
2021, 50(10): 1004004
1 中国科学院半导体研究所半导体材料科学重点实验室, 北京 100083
2 中国科学院大学材料科学与光电技术学院, 北京 100049
因量子级联激光器的工作波长可覆盖红外到太赫兹波段,在大气污染检测、工业污染监控、医学诊断、毒品及生化危险品灵敏检测、自由空间通信等领域具有广泛的应用前景。从1994年问世到现在,量子级联激光器已经从最初的实验室原理器件发展到可实用化的红外波段最具发展前景的半导体激光器。本文从量子级联激光器设计思路的演进、工作波长范围的扩展、提高输出功率、实现单模的宽调谐、提高光束质量等方面依次介绍相应的研究进展,最后给出简要总结与展望。
激光器 量子效应 隧穿 量子级联激光器
1 中国科学院半导体 材料科学重点实验室, 北京 100083
2 中国科学院大学 材料科学与光电技术学院, 北京 101408
量子级联激光器具有效率高、体积小、功耗低、波长可大范围选取的特点, 已经被广泛应用于定向红外对抗系统、自由空间光通信和痕量气体传感等领域。回顾了量子级联激光器近20年的进展。首先总结了量子级联激光器的总体发展历程和发光原理; 接着介绍了主要用于定向红外对抗的大功率量子级联激光器的几种典型有源区结构设计, 然后讨论了气体传感用的单模分布反馈量子级联激光器; 接着又论述了单片集成高亮度量子级联激光器相干阵列的研究情况; 此外, 还介绍了自由空间通信用的量子级联激光器的发展情况; 最后, 描述了近些年才出现中红外量子级联激光器光频梳的研究进展。
量子级联激光器 定向红外对抗 自由空间通信 相位锁定阵列 光频梳 quantum cascade laser directed infrared countermeasure free space optical communication phase locked arrays frequency comb 红外与激光工程
2018, 47(10): 1003001