本文对玻璃晶圆加工过程中常见的三种缺陷类型——颗粒缺陷、气泡缺陷、三角形划痕的散射光强进行分析, 发现不同缺陷结构在空间中有不同的散射光强分布特点, 可以建立缺陷结构与散射光强空间分布的对应关系; 同时针对产线中晶圆表面微米量级缺陷, 进行了不同尺寸颗粒缺陷的散射光强度计算, 得出了微米级别缺陷尺寸与散射光强度之间的关系曲线。从而提出一种非成像缺陷检测方法: 检测获取缺陷散射光强值与空间分布, 利用散射光空间分布结构确定缺陷结构以及利用散射光强计算缺陷尺寸, 从而间接确定缺陷信息, 达到缺陷检测的目的。为晶圆产业应用过程中的缺陷快速检测提供方法参考。

为了抑制在头戴式增强现实显示系统中激光扫描(LBS)与光栅光波导直接耦合时产生的带斑(Banding)现象并改善系统的最终成像效果,首先介绍了Banding现象,分析讨论了Banding现象产生的具体原因。随后,提出了一种加入扩散片的扩束抑制方法,并通过扩束光路结构验证了其可行性。针对抑制方案进行了小尺寸、大视场中继光路的设计优化,以满足其在头戴式增强现实显示系统中的应用。本设计的系统总长小于25 mm,在截止频率43 lp/mm处,前端与后端各视场的调制传递函数值均大于0.3,畸变均小于±2.2%,满足设计的各项指标需求。所提方法可以有效抑制LBS与光栅光波导配合使用过程中的Banding现象,因此为基于LBS的头戴式增强现实显示系统的研究提供了一定的参考价值,具有潜在的应用前景。

The wedge-shaped lens is the key and special optical component of the final optics assembly (FOA) in high power laser facility. The wedge-shaped lens wedge angle measurement plays a remarkable role in focusing performance of high power laser. If processing angle and work attitude of the wedge-shaped lens deviate from the specific work angle, big surface deviation will be introduced into the FOA. Special shape of the wedge-shaped lens is not conducive to the measurements of the transmission profile and wedge angle. A set of wedge-shaped lens measurement adjustment programmes is proposed, including measurement of the wedge-shaped lens in processing process, and off-line measurement of wedge-shaped lens during alignment and on-line measurement during the debugging process. The scheme can ensure the processing precision and working attitude of the wedge-shaped lens, guarantee the beam quality and the positioning accuracy of the FOA components of high power laser system.

楔形透镜是高功率激光系统终端光学组件的关键元件，也是较为特殊的光学元件，楔形透镜的楔角测量关系着高功率激光的聚焦性能。终端组件中楔形透镜的加工角度、工作姿态一旦偏离了特定的工作角度，终端组件会引入大的面形偏差，楔形透镜特殊的形状不利于楔形透镜面形、楔角的测量。提出了一整套楔形透镜测量调整方案，包括楔形透镜加工过程中的测量方案，楔形透镜安装过程中的离线测量与调整方案，以及终端组件上线调试过程中的在线调试测量方案。该套方案的实施能够保证楔形透镜的加工精度，及组件中楔形透镜能够工作在最佳工作姿态，保障了高功率激光系统终端组件的光束质量和定位精度。

为了提高熔石英元件表面抗激光损伤阈值, 利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果, 通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构, 以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明, 超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试, 获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数, 研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。

Target and beam alignment unit is one of the core parts of high power laser drivers and plays a crucial role in the adjustment of target position and pose, the laser pointing and so on. Combined the alignment accuracy requirements of the laser driver with the physics experiment implement, basic functions of the target and beam alignment unit can be acquired to meet the requirements of physics experiments using the design and adjustment of the optical-mechanical-electronic systems. However, with the increasing number of the main lasers, slewing of multi-beams and positioning with high accuracy have become the goal of developing target and beam alignment unit. Present studies on the target and beam alignment unit of both domestic and international high power laser drivers are reviewed, a universal method for the alignment unit design is investigated and main issues in the development of the target and beam alignment unit are also analyzed.

High accuracy of target aiming and positioning is required in the study of the inertial confinement fusion (ICF). A system based on the chamber center reference system, the target positing system and the target alignment sensor is designed. The finite element method is used for analyzing the static deformation and transient stability of this system, and it proposes a calibration method of the high resolution parallel light pipe to achieve the system coupling precision. It achieves target aiming and positioning precision better than 12 μm of the SG-II updated laser facility. Through the SG-II updated laser facility single laser beam across the Φ 800 μm hole target, the perforation efficiency is 97.5%. This provides a solid foundation for high accuracy targeting of the follow-up physical experiment′s requirement.

惯性约束聚变(ICF)研究中对实验靶的瞄准和定位具有很高的精度要求，设计了一套基于中心辅助参考系统、靶定位系统和靶准直器三个单元组合的技术方案，借助有限元法分析了系统静态变形和瞬态稳定性，提出了束靶耦合的高分辨率平行光管精密校准方法，实现了神光II升级装置优于12 μm的靶瞄准和定位精度。该方案使得装置成功实现了Φ800 μm实验靶单路激光97.5%的穿孔效率，为后续相关物理实验的高精度靶瞄准和定位奠定了坚实的基础。

为了提高高功率激光装置中各组成系统调试阶段的工作效率，利用OpenGL 图形软件建立靶了定位仿真系统，使得靶定位算法的调试和初步验证在实验平台等硬件条件尚未完善的情况下能够独立进行。利用模板匹配和3-CCD 空间定位法对靶丸进行定位监测，并考虑姿态调整过程中由于靶杆长度引起的位置偏移，在算法中给予补偿。仿真系统不仅实现了目标靶丸、送靶机构等虚拟构建，还运用OpenGL 成像技术实现了CCD 仿真图像的采集。最后利用该仿真系统对靶丸特征检测、空间位姿计算、补偿式姿态调整等算法进行了调试。结果表明，通过相机监测可将靶丸由任意位姿调至目标零位，验证了该检测与定位算法应用于实际工程的可行性。

靶定位瞄准单元是高功率激光驱动器的核心单元之一，承担靶位姿调整和激光瞄准等功能。结合装置定位瞄准精度要求以及物理方案的实施，通过光机电设计和调试可以实现靶定位瞄准单元的基本功能，满足高功率激光驱动器开展物理实验的要求。然而随着主激光路数的不断增多，多束激光的快速瞄准和高精度定位已成为发展靶定位瞄准单元的目标。综述了国内外高功率激光驱动器靶定位瞄准单元的研究现状，探讨了靶定位瞄准设计的普适性方法，并分析了靶定位瞄准单元发展过程中面临的主要问题。