Jiaming Wang 1Fujun Xu 1,*Lisheng Zhang 1,2Jing Lang 1[ ... ]Bo Shen 1,3,4,**
Author Affiliations
Abstract
1 State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
2 Beijing SinoGaN Semiconductor Technology Co., Ltd., Beijing 101399, China
3 Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
4 Collaborative Innovation Center of Quantum Matter, Beijing 100871, China
The development of semiconductors is always accompanied by the progress in controllable doping techniques. Taking AlGaN-based ultraviolet (UV) emitters as an example, despite a peak wall-plug efficiency of 15.3% at the wavelength of 275 nm, there is still a huge gap in comparison with GaN-based visible light-emitting diodes (LEDs), mainly attributed to the inefficient doping of AlGaN with increase of the Al composition. First, p-doping of Al-rich AlGaN is a long-standing challenge and the low hole concentration seriously restricts the carrier injection efficiency. Although p-GaN cladding layers are widely adopted as a compromise, the high injection barrier of holes as well as the inevitable loss of light extraction cannot be neglected. While in terms of n-doping the main issue is the degradation of the electrical property when the Al composition exceeds 80%, resulting in a low electrical efficiency in sub-250 nm UV-LEDs. This review summarizes the recent advances and outlines the major challenges in the efficient doping of Al-rich AlGaN, meanwhile the corresponding approaches pursued to overcome the doping issues are discussed in detail.
AlGaN-based UV-LEDs Al-rich AlGaN doping 
Journal of Semiconductors
2024, 45(2): 021501
Shunpeng Lu 1,2Jiangxiao Bai 1,2Hongbo Li 1,2Ke Jiang 1,2[ ... ]Dabing Li 1,2,**
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
240 nm AlGaN-based micro-LEDs with different sizes are designed and fabricated. Then, the external quantum efficiency (EQE) and light extraction efficiency (LEE) are systematically investigated by comparing size and edge effects. Here, it is revealed that the peak optical output power increases by 81.83% with the size shrinking from 50.0 to 25.0 μm. Thereinto, the LEE increases by 26.21% and the LEE enhancement mainly comes from the sidewall light extraction. Most notably, transverse-magnetic (TM) mode light intensifies faster as the size shrinks due to the tilted mesa side-wall and Al reflector design. However, when it turns to 12.5 μm sized micro-LEDs, the output power is lower than 25.0 μm sized ones. The underlying mechanism is that even though protected by SiO2 passivation, the edge effect which leads to current leakage and Shockley-Read-Hall (SRH) recombination deteriorates rapidly with the size further shrinking. Moreover, the ratio of the p-contact area to mesa area is much lower, which deteriorates the p-type current spreading at the mesa edge. These findings show a role of thumb for the design of high efficiency micro-LEDs with wavelength below 250 nm, which will pave the way for wide applications of deep ultraviolet (DUV) micro-LEDs.
AlGaN deep ultraviolet micro-LEDs light extraction efficiency size effect edge effect 
Journal of Semiconductors
2024, 45(1): 012504
Author Affiliations
Abstract
National Key Laboratory of Solid-State Microwave Devices and Circuits, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
In this letter, high power density AlGaN/GaN high electron-mobility transistors (HEMTs) on a freestanding GaN substrate are reported. An asymmetric Γ-shaped 500-nm gate with a field plate of 650 nm is introduced to improve microwave power performance. The breakdown voltage (BV) is increased to more than 200 V for the fabricated device with gate-to-source and gate-to-drain distances of 1.08 and 2.92 μm. A record continuous-wave power density of 11.2 W/mm@10 GHz is realized with a drain bias of 70 V. The maximum oscillation frequency (fmax) and unity current gain cut-off frequency (ft) of the AlGaN/GaN HEMTs exceed 30 and 20 GHz, respectively. The results demonstrate the potential of AlGaN/GaN HEMTs on free-standing GaN substrates for microwave power applications.
freestanding GaN substrates AlGaN/GaN HEMTs continuous-wave power density breakdown voltage Γ-shaped gate 
Journal of Semiconductors
2024, 45(1): 012501
邓建阳 1贺龙飞 2,*武智波 1李睿 1[ ... ]冀子武 1,**
作者单位
摘要
1 山东大学 微电子学院,新一代半导体材料研究院,山东 济南 250100
2 广 东省科学院 半导体研究所,广东 广州 510650
3 山东浪潮华光光电子股份有限公司,山东 潍坊 261061
利用磁控溅射和金属有机化学气相沉积方法在c面蓝宝石衬底上生长了深紫外Al0.38Ga0.62N/Al0.55Ga0.45N多量子阱结构,并对其荧光(PL)谱进行了测量。其PL谱的激发密度依赖性测量结果表明,该量子阱的辐射过程包含了局域载流子的散射、极化场的屏蔽和局域态的填充效应;其PL谱的温度依赖性测量结果则表明,该量子阱的辐射过程包含了局域载流子的弛豫、局域载流子的热激发和自由载流子的常规热化效应。这个现象(即多种辐射复合过程的存在)在低温和弱激发测试条件下尤为显著,并且表现出该量子阱结构具有显著的局域深度非均一性和载流子的局域效果,是浅局域载流子的散射效应和深局域态的载流子填充效应共同作用所致。在较低的温度范围内,随着温度升高,该量子阱的辐射过程是由浅局域载流子的弛豫效应和深局域载流子的热激发效应共同作用的结果。这些行为被归因于阱宽起伏所诱发的局域深度的非均一性和载流子的局域效果。
深紫外LED AlGaN多量子阱 光致发光 载流子局域效应 deep-ultraviolet LED AlGaN multiple quantum well photoluminescence carrier localization effect 
发光学报
2023, 44(11): 1974
作者单位
摘要
中国电子科技集团公司第五十八研究所无锡 214035
氮化镓功率器件凭借优异性能被抗辐照应用领域重点关注,为探究氮化镓功率器件抗γ射线辐照损伤能力,明确其辐射效应退化机制,针对增强型AlGaN/GaN高电子迁移率晶体管(High Electron Mobility Transistor,HEMT)器件开展不同偏置(开态、关态和零偏置)条件下的γ射线辐照与不同温度的退火试验,分析器件电学性能同偏置条件和退火环境之间的响应规律。结果表明:随着γ射线辐照剂量的增加,器件阈值电压负漂,跨导峰值、饱和漏电流和反向栅泄漏电流逐渐增加,且在开态偏置条件下器件的电学特性退化更加严重;此外,高温环境下退火会导致器件的电学性能恢复更加明显。分析认为γ射线辐照剂量越高,产生的辐照缺陷越多,同时栅极偏压会降低辐照引发的电子-空穴对的初始复合率,逃脱初始复合的空穴数量增多,进一步增加了缺陷电荷的浓度;而高温环境会导致器件发生隧穿退火或热激发退火,有助于器件性能恢复。氮化镓功率器件的辐照损伤过程及机理研究,为其空间环境应用的评估验证提供了数据支撑。
增强型AlGaN/GaN HEMT器件 总剂量效应 偏置条件 电学性能 退火恢复 Enhanced AlGaN/GaN HEMT devices Total ionizing dose effect Bias conditions Electrical property Annealing recovery 
核技术
2023, 46(11): 110502
Ke Jiang 1,2†Simeng Liang 3†Xiaojuan Sun 1,2,*Jianwei Ben 1,2[ ... ]Ke Xu 3,4,***
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 State Key Laboratory of Virology, College of Life Sciences, Wuhan University, Wuhan 430072, China
4 Institute for Vaccine Research, Animal Biosafety Level 3 Laboratory, Wuhan University, Wuhan 430072, China
Efficient and eco-friendly disinfection of air-borne human respiratory RNA viruses is pursued in both public environment and portable usage. The AlGaN-based deep ultraviolet (DUV) light-emission diode (LED) has high practical potentials because of its advantages of variable wavelength, rapid sterilization, environmental protection, and miniaturization. Therefore, whether the emission wavelength has effects on the disinfection as well as whether the device is feasible to sterilize various respiratory RNA viruses under portable conditions is crucial. Here, we fabricate AlGaN-based DUV LEDs with different wavelength on high-temperature-annealed (HTA) AlN/Sapphire templates and investigate the inactivation effects for several respiratory RNA viruses. The AlN/AlGaN superlattices are employed between the template and upper n-AlGaN to release the strong compressive stress (SCS), improving the crystal quality and interface roughness. DUV LEDs with the wavelength of 256, 265, and 278 nm, corresponding to the light output power of 6.8, 9.6, and 12.5 mW, are realized, among which the 256 nm-LED shows the most potent inactivation effect in human respiratory RNA viruses, including SARS-CoV-2, influenza A virus (IAV), and human parainfluenza virus (HPIV), at a similar light power density (LPD) of ~0.8 mW/cm2 for 10 s. These results will contribute to the advanced DUV LED application of disinfecting viruses with high potency and broad spectrum in a portable and eco-friendly use.
AlGaN DUV LED superlattice SARS-CoV-2 influenza A virus 
Opto-Electronic Advances
2023, 6(9): 230004
刘召强 1,2,3贾童 1,2,3许湘钰 1,2,3楚春双 1,2,3[ ... ]张紫辉 1,2,3,*
作者单位
摘要
1 河北工业大学 电子信息工程学院,天津 300401
2 河北工业大学 天津市电子材料与器件重点实验室,天津 300401
3 河北省先进激光技术与装备重点实验室,天津 300401
随着AlGaN基深紫外发光二极管(DUV LED)的发展,其不仅在杀菌消毒领域得到广泛应用,在日盲紫外光通信领域的应用也受到越来越多的关注。这主要是由于相比其他的紫外光源(如汞灯、激光),其具有功耗低、设计灵活且调制带宽高的优势。而DUV LED的带宽严重依赖于器件尺寸,器件尺寸越小,其带宽越高。但是,随着深紫外微型发光二极管(μLED)的尺寸减少,尽管其带宽得到提高,但是其光功率却急剧下降,这严重限制了深紫外μLED在光通信中的应用。文中主要总结了深紫外μLED作为日盲紫外光通信光源的研究现状和综合分析尺寸效应引起器件性能的变化及其机理;并分析出低的光提取效率和严重的自热效应是影响深紫外μLED光功率的两个主要因素。进而综述了各种提高深紫外μLED光提取效率和改善热学特性的方法。文中将为从事深紫外μLED研究的工作者提供一定的研究方向指导。
AlGaN 深紫外微型发光二极管 调制带宽 光提取效率 AlGaN DUV μLED modulation bandwidth light extraction efficiency 
红外与激光工程
2023, 52(8): 20230390
Author Affiliations
Abstract
1 School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
2 Dynax Semiconductor Inc., Suzhou 215300, China
3 Department of Micro- and Nanoelectronics, Saint Petersburg Electrotechnical University, Saint Petersburg 197376, Russia
A physics-based analytical expression that predicts the charge, electrical field and potential distributions along the gated region of the GaN HEMT channel has been developed. Unlike the gradual channel approximation (GCA), the proposed model considers the non-uniform variation of the concentration under the gated region as a function of terminal applied voltages. In addition, the model can capture the influence of mobility and channel temperature on the charge distribution trend. The comparison with the hydrodynamic (HD) numerical simulation showed a high agreement of the proposed model with numerical data for different bias conditions considering the self-heating and quantization of the electron concentration. The analytical nature of the model allows us to reduce the computational and time cost of the simulation. Also, it can be used as a core expression to develop a complete physics-based transistor Ⅳ model without GCA limitation.
AlGaN/GaN (HEMTs) 2DEG charge distribution electron mobility hydrodynamic model channel temperature 
Journal of Semiconductors
2023, 44(8): 082802
杨帆 1许并社 1,2,3董海亮 1,2张爱琴 1[ ... ]贾志刚 1,2
作者单位
摘要
1 太原理工大学新材料界面科学与工程教育部重点实验室, 太原 030024
2 山西浙大新材料与化工研究院, 太原 030000
3 陕西科技大学材料原子·分子科学研究所, 西安 710021
本文设计了纳米线核壳AlGaN/GaN异质结构, 研究了势垒层厚度、Al组分、掺杂浓度对平面和纳米线异质结构中二维电子气(2DEG)浓度的影响规律。结果表明, 随着势垒层厚度的逐渐增大, 两种结构中2DEG浓度增速逐渐减缓, 当达到40 nm后, 由于表面态电子完全发射, 2DEG浓度逐渐稳定不变。随着Al组分的增加, 极化效应逐渐增强, 使得两种结构在异质界面处的2DEG浓度都逐渐增加。当掺杂浓度逐渐提高时, 两者在异质界面处电势差增大, 势阱加深, 束缚电子能力加强, 最终导致2DEG浓度逐渐增加, 当掺杂浓度增加到2.0×1018 cm-3后, 2DEG面密度达到最大值。与平面结构相比, 纳米线结构可以实现更高的Al组分, 在高Al组分之下, 2DEG面密度最高可达5.13×1013 cm-2, 相比于平面结构有较大的提高。
纳米线结构 平面结构 二维电子气浓度 异质结构 能带结构 AlGaN/GaN AlGaN/GaN nanowire structure planar structure two-dimensional electron gas concentration heterostructure band structure 
人工晶体学报
2023, 52(6): 1136
张傲翔 1任炳阳 2王芳 1,3,4,5,*刘俊杰 1,3,5刘玉怀 1,3,4,5,**
作者单位
摘要
1 郑州大学电气与信息工程学院电子材料与系统国际联合研究中心,河南省电子材料与系统国际联合实验室,河南 郑州 450001
2 郑州大学计算机与人工智能学院,河南 郑州 450001
3 郑州大学智能传感器研究院,河南 郑州 450001
4 郑州唯独电子科技有限公司,河南 郑州 450001
5 郑州大学产业技术研究院有限公司,河南 郑州 450001
为了提升深紫外激光二极管(DUV LDs)的载流子注入效率,优化其工作性能,提出了阶梯型超晶格(SSL)电子阻挡层(EBL)和楔形(WS)空穴阻挡层(HBL)结构。使用Crosslight软件分别仿真了具有矩形EBL和HBL、矩形超晶格(RSL)EBL和塔形(TS)HBL以及SSL EBL和WS HBL的DUV LDs。仿真结果表明,SSL EBL和WS HBL更有效地增加了量子阱(QWs)中的载流子注入,减少了非有源区的载流子泄漏,提高了辐射复合率,降低了阈值电压和阈值电流,提高了DUV LDs的输出功率和电光转换效率。
激光器 深紫外激光二极管 AlGaN 阶梯型超晶格 阻挡层 
激光与光电子学进展
2023, 60(15): 1525001

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