Fabrication of high-quality optics puts a strong demand on high-throughput detection of macroscopic bulk defects in optical components. A dark-field line confocal imaging method is proposed with two distinct advantages: (i) a point-to-line confocal scheme formed by a columnar elliptical mirror and an optical fiber bundle breaks through the constraint on light collection angle and field of view in the traditional line confocal microscopy using an objective, allowing for an extended confocal line field of more than 100 mm while maintaining a light collection angle of 27°; (ii) the bulk defects are independently illuminated as a function of time to eliminate the cross talk in the direction of the confocal slit, thus preserving point confocality and showing the optical section thicknesses to be 162 µm in the axial direction, and 19 and 22 µm in the orthogonal transverse directions. The experimental results verify that the method has a minimum detectable bulk defect of less than 5 µm and an imaging efficiency of 400mm2/s. The method shows great potential in high-throughput and high-sensitivity bulk defects detection.

为了更好地理解相位光栅的成像过程，提出了一种新的分析方法——主级次分析法。主级次分析法分析相位光栅成像过程的关键思路在于找到相位光栅成像过程中起主要作用的衍射级次，忽略掉不重要的衍射级次，从而极大地化简了分析过程。主级次分析法的分析结果表明，对于占空比50%的π相位光栅，其在成像过程中起主要作用的是光栅的正负一级衍射，但正负三级衍射也是必不可少的。而对于占空比50%的π/2相位光栅，其成像过程中零级衍射的作用和正负一级衍射的作用同样重要，零级衍射不是仅仅产生有害的背景光强。

在镜面表面缺陷检测技术中，常用的暗场成像检测法对于波纹类的三维镜面缺陷难以形成对比度，为此提出了一种结合暗场散射法和曲率成像法的综合型镜面表面缺陷检测方法。分别对暗场成像原理和基于条纹反射的曲率成像原理进行了理论分析；构建了结合两种成像模块的综合型镜面缺陷检测的实验装置；对注塑反射镜和抛光玻璃薄片两种样品进行了缺陷成像实验。实验结果表明，暗场散射成像可以有效检测麻点、划痕和油污等不同类型镜面缺陷，曲率分布图像可以清晰反映镜面表面的三维波纹缺陷，综合两种方法可以全面反映镜面表面的各类缺陷。该方法可为精密光学元件表面缺陷检测提供参考。