Author Affiliations
Abstract
1 Key Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
To establish the mechanism of surface change in a continuous polishing system, an ideal mathematical model is built based on Winkler’s hypothesis and the Preston equation. The basic features of the model are the change rates in the surface peak–valley (PV) values of the workpiece, conditioning disk and pitch lap, rather than the specific surface shapes. In addition, an equilibrium state exists in the system, indicating that the surface change rates are all zero. Under equilibrium, the surface of the lap could remain flat, and it is insensitive to the surface error of the workpiece. These characteristics lay the theoretical foundations for high-efficiency and high-precision polishing. The methods to obtain an equilibrium state with flat surfaces are then proposed and confirmed experimentally. High-precision surfaces better than λ/10 （λ=632.8 nm) are consistently produced experimentally.
continuous polishing continuous polishing equilibrium state equilibrium state high accuracy high accuracy high efficiency high efficiency surface figure control surface figure control High Power Laser Science and Engineering
2015, 3(2): 02000001
