脉冲激光输出参数对光学薄膜损伤阈值的影响

严荣荣; 苏俊宏; 杨利红

光学与光电技术, 2019, 17 (2): 34, 网络出版: 2019-05-10

脉冲激光输出参数对光学薄膜损伤阈值的影响

Influence of Pulsed Laser Output Parameters on Optical Film Damage Threshold

论文大纲

严荣荣 ^*苏俊宏杨利红

作者单位

西安工业大学光电工程学院, 陕西西安 710021

脉冲激光输出参数薄膜损伤阈值不确定度单因素控制变量法 pulsed laser output parameters film damage threshold uncertainty single factor control variable method

摘要

激光诱导薄膜损伤阈值的准确测量是判别光学薄膜抗激光损伤能力的重要依据。采用单因素控制变量法, 建立了激光能量误差、聚焦光斑尺寸误差与损伤阈值误差的数值模型, 理论分析了能量误差、聚焦光斑尺寸误差对薄膜损伤阈值的影响, 通过搭建实验平台测量了辐照在薄膜表面的实际能量和聚焦光斑尺寸, 根据实验结果采用统计学原理评估了薄膜损伤阈值不确定度。研究结果表明: 随着能量误差、聚焦光斑尺寸误差的增大, 损伤阈值误差也增大。单层膜样品实例分析, 损伤阈值测量合成不确定度为0.87 J/cm2。因此, 研究能量和聚焦光斑尺寸误差对损伤阈值的影响, 为获得准确的薄膜损伤阈值测试结果提供了方向。

Abstract

Accurate measurement of laser-induced film damage threshold is an important basis for discriminating the ability of optical films to resist laser damage. The numerical model of laser parameters and energy density is established, by using the single factor control variable method. And the influence of energy error and focus spot error are theoretically analyzed. The real energy and focus spot error of irradiated on the film surface are measured by setting up the experimental platform. The statistical principle is used to evaluate the uncertainty of the optical film damage threshold based on the experimental results. The results of the degree study show that the film damage threshold increases with the energy error and the focus spot size error increasing. An example analysis of a single-layer film sample is available, and the total uncertainty of the damage threshold measurement is 0.87 J/cm2 . Therefore, the influence of energy and focus spot size error on the damage threshold is studied, which provides a direction for obtaining accurate measurement results of film damage threshold.

参考文献

[1] 雷仕湛, 邵兰星, 闫海生, 等. 中国激光史录［M］. 1版. 上海: 复旦大学出版社, 2016: 307-308.

LEI Shi-zhan, SHAO Lan-xing, YAN Hai-sheng, et al. Laser history of China［M］. 1st ed. Shanghai: Fudan University Press, 2016: 307-308.

[2] 朱耀南. 光学薄膜激光损伤阈值测试方法的介绍和讨论［J］. 激光技术, 2006, 30(5): 532-535.

ZHU Yao-nan. Discussion of the measurement methods for laser induced damage threshold of optical coating［J］. Laser Technology, 2006, 30(5): 532-535.

[3] Chi F T, Zhang Q, Zhang L J, et al. Nanostructured magnesium fluoride antireflective films with ultra-high laser induced damage thresholds［J］. Materials Letters, 2015, 150: 28-30.

[4] 单翀, 赵元安, 张喜和, 等. 基于高斯脉冲激光空间分辨测量光学元件表面激光损伤阈值的研究［J］. 中国激光, 2018, 45(1): 0104002.

SHAN Chong, ZHAO Yuan-an, ZHANG Xi-he, et al. Based on Gaussian pulsed laser spatial resolution to measure the laser damage threshold of optical components surface［J］. Chinese Journal of Lasers, 2018, 45(1): 0104002.

[5] 孙承炜, 陆启生, 范正修, 等. 激光辐照效应［M］. 1版. 北京: 国防工业出版社, 2002: 273-277.

SUN Cheng-wei, LU Qi-sheng, FAN Zheng-xiu, et al. Laser irradiation effect［M］. 1st ed. Beijing: National Defence Industry Press, 2002: 273-277.

[6] 张问辉, 胡建平, 陈建国, 等. 高功率激光诱导光学元件损伤阈值测量的不确定度分析［J］. 强激光与粒子束, 2005, 17(4): 528-532.

ZHANG Wen-hui, HU Jian-ping, CHEN Jian-guo, et al. Uncertainty analysis of damage threshold measurement of high power laser induced optical elements［J］. High Power Laser and Particle Beams, 2005, 17(4): 528-532.

[7] 胡建平, 马平, 许乔. 光学元件的激光损伤阈值测量［J］. 红外与激光工程, 2006, 35(2): 187-191.

HU Jian-ping, MA Ping, XU Qiao. Measurement of laser damage threshold of optical elements［J］. Infrared and Laser Engineering, 2006, 35(2): 187-191.

[8] 徐均琪, 苏俊宏, 葛锦蔓, 等. 光学薄膜激光损伤阈值测量不确定度［J］. 红外与激光工程, 2017, 46(8): 0806007.

XU Jun-qi, SU Jun-hong, GE Jin-man, et al. Uncertainty in laser damage threshold measurement of optical films［J］. Infrared and Laser Engineering, 2017, 46(8): 0806007.

[9] K H Guenther, T W Humpherys, J Balmer, et al. 1.064 μm laser damage of thin film optical coatings: a round-robin experiment involving various pulse lengths and beam diameters［J］. Applied Optics, 1984, 23(21): 3743-3752.

[10] 刘虹. 哈特曼-夏克方法在激光光束波前和光束质量检测中的应用研究［D］. 北京: 北京工业大学, 2001: 29-37.

LIU Hong. Hartmann-Shack method for laser beam wavefront and beam quality detection［D］. Beijing: Beijing University of Technology, 2001: 29-37.

[11] 肖青, 刘侠, 邓剑钦, 等. 基于相机式激光光束参数测量精度的影响因素分析［J］. 激光与光电子学进展, 2018, 55(7): 071401.

XIAO Qing, LIU Xia, DENG Jian-qin, et al. Analysis of influencing factors based on camera laser beam parameter measurement accuracy［J］. Laser & Optoelectronics Progress, 2018, 55(7): 071401.

[12] 吴伟伟, 唐军, 吴兆杰. 高能脉冲激光远场多参量测试系统设计［J］. 光学与光电技术, 2011, 9(1): 9-12.

WU Wei-wei, TANG Jun, WU Zhao-jie. Design of Multi-parameter Measurement System for High Energy Pulsed Laser in far Filed［J］. Opticacs&Optoelectronic Technology, 2011, 9(1): 9-12.

[13] 邱海华, 叶巍, 崔唯唯. 大功率激光器综合参数测试系统设计与实现［J］. 光学与光电技术, 2016, 14(6): 26-29.

QIU Hai-hua, YE Wei, CUI Wei-wei. Design and Implementation of a Comprehensive Parameters Test System of the High-Power Laser［J］. Opticacs & Optoelectronic Technology, 2016, 14(6): 26-29.

[14] A E Siegman. How to (Maybe) measure laser beam quality［J］. OSA Trends in Optics and Photonics Series, 1998, 17(2): 184-199.

[15] 倪明田, 吴良芝. 计算机图形学［M］. 1版. 北京: 北京大学出版社, 1999: 249-252.

NI Ming-tian, WU Liang-zhi. Computer graphics［M］. 1st ed. Beijing: Peking University Press, 1999: 249-252.

[16] ISO11254, Test method for laser radiation induced damage threshold of optical surfaces ［S］. The International for Standardization, 1992.

严荣荣, 苏俊宏, 杨利红. 脉冲激光输出参数对光学薄膜损伤阈值的影响[J]. 光学与光电技术, 2019, 17(2): 34. YAN Rong-rong, SU Jun-hong, YANG Li-hong. Influence of Pulsed Laser Output Parameters on Optical Film Damage Threshold[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2019, 17(2): 34.

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