中国激光, 2018, 45 (9): 0902002, 网络出版: 2018-09-08
室温脉冲激光沉积法合成Bi3.95Er0.05Ti3O12薄膜及其介电性能研究 下载: 642次
Bi3.95Er0.05Ti3O12 Thin Films Synthesized by Pulsed Laser Deposition Technique and Their Dielectric Properties at Room Temperature
图 & 表
图 1. 不同沉积氧气压下制备的BErT薄膜XRD图
Fig. 1. XRD patterns of BErT thin films prepared under different deposition oxygen pressures
图 2. 不同沉积氧气压下制备的BErT薄膜SEM图。(a) 1 Pa;(b) 3 Pa;(c) 5 Pa;(d) 7 Pa
Fig. 2. SEM images of BErT thin films prepared under different deposition oxygen pressures. (a) 1 Pa; (b) 3 Pa; (c) 5 Pa; (d) 7 Pa
图 3. 沉积氧气压为3 Pa时的BErT薄膜的断面图
Fig. 3. Sectional morphology of BErT thin films deposited under oxygen pressure of 3 Pa
图 4. BErT薄膜的介电常数和介电损耗随沉积氧气压的变化曲线
Fig. 4. Dielectric constant and dielectric loss of BErT thin films versus deposition oxygen pressure
图 5. BErT薄膜的介电常数和介电损耗随频率的变化
Fig. 5. Dielectric constant and dielectric loss of BErT thin films versus frequency
图 6. 1 kHz频率下BErT薄膜的介电常数和介电损耗随电场强度的变化
Fig. 6. Dielectric constant and dielectric loss of BErT thin films versus electric field intensity at 1 kHz
图 7. 1 kHz频率下BErT薄膜的介电常数和介电损耗随温度的变化
Fig. 7. Dielectric constant and dielectric loss of BErT thin films versus temperature at frequency of 1 kHz
梁立容, 魏爱香, 莫忠. 室温脉冲激光沉积法合成Bi3.95Er0.05Ti3O12薄膜及其介电性能研究[J]. 中国激光, 2018, 45(9): 0902002. Liang Lirong, Wei Aixiang, Mo Zhong. Bi3.95Er0.05Ti3O12 Thin Films Synthesized by Pulsed Laser Deposition Technique and Their Dielectric Properties at Room Temperature[J]. Chinese Journal of Lasers, 2018, 45(9): 0902002.