光学元件表面疵病标准板系统设计
刘旭, 任寰, 柴立群, 陈波, 杨甬英, 高鑫. 光学元件表面疵病标准板系统设计[J]. 中国激光, 2012, 39(s1): s116005.
Liu Xu, Reb Huan, Chai Liqun, Chen Bo, Yang Yongying, Gao Xin. Calibration Plate Design for Surface Defect Inspecting System[J]. Chinese Journal of Lasers, 2012, 39(s1): s116005.
[1] 戴名奎, 徐德衍. 光学元件的疵病检验与研究现状［J］. 光学仪器, 1996, 18(4): 32～39
Dai Mingkui, Xu Deyan. The present situation of imperfections testing and researching on the optical components［J］. Optical Instruments, 1996, 18(4): 32～39
[2] A. Huard. Visibility method to classify microscopic surface defects for both reflection and t transmission systems［C］. SPIE, 1985, 525: 36～42
[3] L. R. Baker. Inspection of surface flaws by comparator microscopy［J］. Appl. Opt., 1988, 27(22): 4620～4625
[4] 张晓, 杨国光, 程上彝 等. 光学表面疵病的激光频谱分析法及其自动检测仪［J］. 仪器仪表学报, 1994, 15(4): 396～399
Zhang Xiao, Yang Guoguang, Cheng Shangyi et al.. Laser frequency spectrum analysis method and automatic inspection instrument of optical surface imperfection［J］. Chinese Journal of Scientific Instrument, 1994, 15(4): 396～399
[5] 汪凤全, 杨甬英, 孙丹丹. 精密表面缺陷的数字化检测系统研究［J］. 光学仪器, 2006, 28(3): 71～75
[6] 王雪, 谢志江, 孙红岩 等. 大口径精密光学元件表面疵病检测系统研究［J］. 仪器仪表学报, 2006, 27(10): 1262～1265
Wang Xue, Xie Zhijiang, Sun Hongyan et al.. Study on automatic flaw inspection system for large caliber precision optical surface［J］. Chinese Journal of Scientific Instrument, 2006, 27(10): 1262～1265
[7] GB 1185289. 光学零件表面疵病［S］. 1989
GB 1185-89. Surface defect s of optical components［S］. 1989
[8] 刘旭, 杨甬英, 刘东 等. 光学元件表面疵病检测扫描拼接的误差分析［J］. 光电子 激光, 2008, 19(8): 1088～1093
Liu Xu, Yang Yongying, Liu Dong et al.. Error analysis of sub-aperture synthesis for detecting surface defects of optical components［J］. Journal of Optoelectronics·Laser, 2008, 19(8): 1088～1093
[9] 程晓峰, 徐旭, 张林 等. 基于高分辨率的大口径光学元件疵病检测［J］. 强激光与粒子束, 2009, 21(11): 1678～1680
Cheng Xiaofeng, Xu Xu, Zhang Lin et al.. Defect testing of large aperture optics based on high resolution CCD camera［J ］. High Power Laser and Particle Beams, 2009, 21(11): 1678～1680
[10] 杨甬英, 陆春华, 梁蛟 等. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统［J］. 光学学报, 2007, 27(6): 1031～1038
刘旭, 任寰, 柴立群, 陈波, 杨甬英, 高鑫. 光学元件表面疵病标准板系统设计[J]. 中国激光, 2012, 39(s1): s116005. Liu Xu, Reb Huan, Chai Liqun, Chen Bo, Yang Yongying, Gao Xin. Calibration Plate Design for Surface Defect Inspecting System[J]. Chinese Journal of Lasers, 2012, 39(s1): s116005.
PDF全文
