基于65 nm标准CMOS工艺的3.0 THz 探测器
A 3.0 THz detector in 65 nm standard CMOS process
1 State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing00083, China
2 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing100083, China
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing100049, China
方桐, 刘力源, 刘朝阳, 冯鹏, 李媛媛, 刘俊岐, 刘剑, 吴南健. 基于65 nm标准CMOS工艺的3.0 THz 探测器[J]. 红外与毫米波学报, 2020, 39(1): 56. Tong FANG, Li-Yuan LIU, Zhao-Yang LIU, Peng FENG, Yuan-Yuan LI, Jun-Qi LIU, Jian LIU, Nan-Jian WU. A 3.0 THz detector in 65 nm standard CMOS process[J]. Journal of Infrared and Millimeter Waves, 2020, 39(1): 56.
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