光学学报, 2004, 24 (2): 251, 网络出版: 2006-06-12   

膜厚监控系统的光谱宽度对窄带滤光片性能的影响

Effect of Spectral Width of Thickness-Monitoring System on Performance of Narrow-Band Filters
作者单位
浙江大学现代光学仪器国家重点实验室, 杭州 310027
引用该论文

顾培夫, 陆巍, 陈海星, 杨毓铭, 李海峰, 章岳光, 刘旭, 唐晋发. 膜厚监控系统的光谱宽度对窄带滤光片性能的影响[J]. 光学学报, 2004, 24(2): 251.

顾培夫, 陆巍, 陈海星, 杨毓铭, 李海峰, 章岳光, 刘旭, 唐晋发. Effect of Spectral Width of Thickness-Monitoring System on Performance of Narrow-Band Filters[J]. Acta Optica Sinica, 2004, 24(2): 251.

参考文献

[1] Gu Peifu, Bai Shengyuan, Li Haifeng et al.. Design of DWDM thin-film interference filters. Acta Optica Sinica (光学学报), 2002, 22(7): 794~797 (in Chinese)

[2] Gu Peifu, Chen Haixing, Lu Wei et al.. Temperature stability of the central wavelength for WDM thin film bandpass filters. Acta Optica Sinica (光学学报), to be published (in Chinese)

[3] Gu Peifu, Li Haifeng, Zhang Yueguang et al.. Uniformity of layer thickness of DWDM filters prepared by ion-beam sputtering and ion-assisted deposition. Optical Technique (光学技术), 2001, 27(5):410~412 (in Chinese)

[4] Gu Peifu, Li Haifeng, Zhang Yueguang et al.. Characteristics and improvement of dense wavelength division multiplexing thin film filters used in tilted incidence. Acta Optica Sinica (光学学报), 2003, 23(3):377~380 (in Chinese)

[5] Zhou Jiulin, Yin Shubai. Optical Thin Film Technology (光学薄膜技术). Beijing: National Defence Industry Publishing House, 1974. 318~345 (in Chinese)

[6] Son Daiyu, Kazuo K, Cai Xuyang et al.. Hi-precision optical thickness monitor applied to manufacture of ultra narrow band pass filter. Optical Instruments (光学仪器), 1999, 21(4~5):130~136 (in Chinese)

[7] Macleod H A. The effect of errors in the optical monitoring of narrow-band all dielectric thin film optical filters. Optica Acta, 1974, 21(6):429~443

[8] Gu Peifu, Li Haifeng, Zhang Yueguang et al.. Refractive indexes of oxidized thin films deposited by ion beam sputtering. Acta Optica Sinica (光学学报), 2002, 22(3):290~293 (in Chinese)

[9] Tang Jinfa, Zhen Quan. Applied Thin-Film Optics (应用薄膜光学). Shanghai: Shanghai Science & Technology Press, 1983. 249 (in Chinese)

[10] Lee C C. Thin-Film Optics and Coating Technology (薄膜光学与镀膜技术). 2nd ed., Taipei: Yi Hsien Publishing Company, 2001. 208~209 (in Chinese)

顾培夫, 陆巍, 陈海星, 杨毓铭, 李海峰, 章岳光, 刘旭, 唐晋发. 膜厚监控系统的光谱宽度对窄带滤光片性能的影响[J]. 光学学报, 2004, 24(2): 251. 顾培夫, 陆巍, 陈海星, 杨毓铭, 李海峰, 章岳光, 刘旭, 唐晋发. Effect of Spectral Width of Thickness-Monitoring System on Performance of Narrow-Band Filters[J]. Acta Optica Sinica, 2004, 24(2): 251.

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