激光陀螺基片散射收集系统的设计与分析

杨开勇; 魏志猛; 龙兴武; 刘贱平

光子学报, 2011, 40 (4): 573, 网络出版: 2011-05-10

激光陀螺基片散射收集系统的设计与分析

Design and Analysis of the Scattering Light Collection System for Substrates in Laser-gyro

论文大纲

杨开勇 ^*魏志猛龙兴武刘贱平

作者单位

国防科学技术大学光电科学与工程学院光电工程系，长沙 410073

表面粗糙度表面散射体散射石英基片激光陀螺 Surface roughness Surface scattering Volume scattering Fused silica substrate Laser-gyro

摘要

研究了散射测量在激光陀螺用石英基片表面检测中的应用.比较发现，收集物镜比积分球更有利于体散射的消除，更适用于直接检测超光滑石英基片表面的散射测试系统.用ZEMAX设计了散射光收集物镜，使其数值孔径达到了0.4，并完全消除了轴上距离大于1.5 mm的散射点的体散射；为了消除光电倍增管输出本身随时间长漂的问题，设计了特定的散射光收集系统的结构，将散射光和反射光分时打在同一个光电倍增管上.分析发现，这种设置能有效消除光电倍增管输出随时间趋势性漂移的问题，增强了系统长时间的稳定性，有效保障了其工程实用性.

Abstract

Application of light scattering measurement in the inspection of fused silica substrates for laser-gyro application was studied. It was found that collecting objective is more propitious to eliminate volume scattering than integrating sphere and more appropriate to the measurement of scattering light for directly detecting supersmooth surfaces of fused silica substrates. Collecting objective(N.A. is 0.4) was designed by ZEMAX and volume scattering from points whose axile distances are more than 1.5 millimeters was eliminated completely. To solve the drift problem of photomultiplier tube, specific structure of collecting system was designed, so that scattering light and reflecting light can strike on the same photmulitplier tube on separate time. It was found that the drift problem of photomultipolier tube can be solved with this setting, so that the stability of the scattering measurement system over long time span can be improved greatly and its practicability in engineering is ensured.

参考文献

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杨开勇, 魏志猛, 龙兴武, 刘贱平. 激光陀螺基片散射收集系统的设计与分析[J]. 光子学报, 2011, 40(4): 573. YANG Kai-yong, WEI Zhi-meng, LONG Xing-wu, LIU Jian-ping. Design and Analysis of the Scattering Light Collection System for Substrates in Laser-gyro[J]. ACTA PHOTONICA SINICA, 2011, 40(4): 573.

激光陀螺基片散射收集系统的设计与分析

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