国防科学技术大学 光电科学与工程学院 光电工程系，长沙 410073
研究了散射测量在激光陀螺用石英基片表面检测中的应用.比较发现，收集物镜比积分球更有利于体散射的消除，更适用于直接检测超光滑石英基片表面的散射测试系统.用ZEMAX设计了散射光收集物镜，使其数值孔径达到了0.4，并完全消除了轴上距离大于1.5 mm的散射点的体散射；为了消除光电倍增管输出本身随时间长漂的问题，设计了特定的散射光收集系统的结构，将散射光和反射光分时打在同一个光电倍增管上.分析发现，这种设置能有效消除光电倍增管输出随时间趋势性漂移的问题，增强了系统长时间的稳定性，有效保障了其工程实用性.
表面粗糙度 表面散射 体散射 石英基片 激光陀螺 Surface roughness Surface scattering Volume scattering Fused silica substrate Laser-gyro
Author Affiliations
Abstract
College of Optoelectric Science and Engineering, National University of Defense Technology, Changsha 410073, China
Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.
测量 积分散射 超光滑基片 质量控制 120.5820 Scattering measurements 290.2558 Forward scattering 310.3840 Materials and process characterization 120.4640 Optical instruments Chinese Optics Letters
2010, 8(2): 181
