强激光与粒子束, 2010, 22 (12): 2865, 网络出版: 2011-01-05   

改性剂对旋转法SiO2减反膜均匀性的影响

Effect of modifiers on uniformity of spin-coated sol-gel silica antireflective films
作者单位
成都精密光学工程研究中心, 成都 610041
引用该论文

杨伟, 李海波, 张清华, 马红菊, 惠浩浩, 刘志超, 马平. 改性剂对旋转法SiO2减反膜均匀性的影响[J]. 强激光与粒子束, 2010, 22(12): 2865.

Yang Wei, Li Haibo, Zhang Qinghua, Ma Hongju, Hui Haohao, Liu Zhichao, Ma Ping. Effect of modifiers on uniformity of spin-coated sol-gel silica antireflective films[J]. High Power Laser and Particle Beams, 2010, 22(12): 2865.

参考文献

[1] 肖磊, 吴卫东, 卢铁城,等.SiO2胶体晶体自组装技术[J].强激光与粒子束, 2010, 22(6):1275-1279.(Xiao Lei, Wu Weidong, Lu Tiecheng, et al. Self-assembly of SiO2 colloidal crystals. High Power Laser and Particle Beams, 2010, 22(6):1275-1279)

[2] Suratwala T, Carman L, Thomas I. NIF anti-reflective coating solutions: preparation, procedures and specifications[R]. UCR-ID-154-626, 2003.

[3] Kozuka H, Hirano M. Radiative striations and surface roughness of alkoxide-derived spin coating films[J]. Journal of Sol-Gel Science and Technology, 2000, 19(1-3):501-504.

[4] Daniels B K, Szmanda C R, Templeton M K, et al. Surface tension effects in microlithography-striations[C]//Proc of SPIE. 1986, 631:192-201.

[5] Birnie D P Ⅲ. Rational solvent selection strategies to combat striation formation during spin coating of thin films[J]. J Mater Res, 2001, 16(4):1145-1154.

[6] Birnie D P Ⅲ, Kaz D M, Talor D J. Surface tension evolution during early stages of drying of sol-gel coatings[J]. Journal of Sol-Gel Science and Technology, 2009, 49(2):233-237.

[7] Kozuka H, Ishikawa Y, Ashibe N. Radiative striations of spin-coating films: surface roughness measurement and in-situ observation[J]. Journal of Sol-Gel Science and Technology, 2004, 31(1-3):245-248.

[8] Strawhecker K E, Kumar S K. The critical role of solvent evaporation on the roughness of spin-cast polymer films[J]. Macromolecules, 2001, 34(14):4669-4672.

[9] Du Xinmin, Orignac X, Almeida R M. Striation-free, spin-coated sol-gel optical films[J]. J Am Ceram Soc, 1995, 78(8):2254-2256.

[10] Stber W, Fink A, Bohn E. Controlled growth of monodisperse silica spheres in the micro size range[J]. J Colloid Interface Sci, 1968, 26(1):62-66.

[11] Bornside D E, Macosko C W, Scriven L E. On the modelling of spin coating[J]. Journal of Imaging Technology, 1987, 13:122-130.

[12] 汤加苗, 朱从善, 夏海平,等.PEG对SiO2溶胶-凝胶中颗粒度分布和孔结构的影响[J].材料研究学报, 1998, 12(1):79-82.(Tang Jiamiao, Zhu Congshan, Xia Haiping, et al. Effect of PEG on partical distribution and pore structure in silica sol and gel. Chinese Journal of Material Research, 1998, 12(1):79-82)

[13] 张磊, 徐耀, 黄祖鑫,等.聚乙二醇对溶胶-凝胶SiO2增透膜激光损伤行为的影响[J].强激光与粒子束, 2005, 17(5):669-672.(Zhang Lei, Xu Yao, Huang Zuxin, et al. Effect of PEG on laser damage of sol-gel SiO2 anti-reflective coating. High Power Laser and Particle Beams, 2005, 17(5):669-672)

[14] Floch H G. Sol-gel broadband antireflective coating for advanced laser-glass amplifiers[C]//Proc of SPIE. 1994, 2288:14-24.

杨伟, 李海波, 张清华, 马红菊, 惠浩浩, 刘志超, 马平. 改性剂对旋转法SiO2减反膜均匀性的影响[J]. 强激光与粒子束, 2010, 22(12): 2865. Yang Wei, Li Haibo, Zhang Qinghua, Ma Hongju, Hui Haohao, Liu Zhichao, Ma Ping. Effect of modifiers on uniformity of spin-coated sol-gel silica antireflective films[J]. High Power Laser and Particle Beams, 2010, 22(12): 2865.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!