半导体光电, 2018, 39 (5): 643, 网络出版: 2019-01-10
基于热平衡机理的质子交换炉温控系统数学模型
Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism
基本信息
| DOI: | 10.16818/j.issn1001-5868.2018.05.008 |
| 中图分类号: | TN252 |
| 栏目: | 材料、结构及工艺 |
| 项目基金: | -- |
| 收稿日期: | 2018-03-21 |
| 修改稿日期: | -- |
| 网络出版日期: | 2019-01-10 |
| 通讯作者: | |
| 备注: | -- |
伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643. FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.
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