基于热平衡机理的质子交换炉温控系统数学模型

伏娜; 张晞

doi:doi:10.16818/j.issn1001-5868.2018.05.008

半导体光电, 2018, 39 (5): 643, 网络出版: 2019-01-10

基于热平衡机理的质子交换炉温控系统数学模型

Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism

论文大纲

伏娜张晞

作者单位

北京航空航天大学仪器科学与光电工程学院, 北京 100191

铌酸锂光波导质子交换炉热平衡温度控制数学模型 lithium niobate optical waveguide proton exchange furnace heat balance temperature control mathematical model

摘要

铌酸锂波导集成光学芯片是高精度光纤陀螺系统的核心器件, 其性能直接影响光纤陀螺系统的性能。而质子交换炉是用质子交换法制备铌酸锂光波导的主要设备, 其炉温的控制质量直接影响铌酸锂光波导的质量。为了实现炉温的精确控制, 以炉膛内空气的温度为控制对象, 基于热平衡机理建立了质子交换炉温控模型, 并在此模型基础上进行了稳定性分析, 并利用MATLAB软件对温控模型进行PID控制仿真, 结果表明, 所建立出来的温控模型是稳定的, 但系统采用PID控制时抗干扰能力差, 这为进一步研究温度控制策略提供了依据。

Abstract

As the core component of high precision fiber optic gyroscope system, the performance of lithium niobate waveguide integrated optical chip directly affects the performance of fiber optic gyroscope system. Proton exchange furnace is the main equipment for the preparation of lithium niobate optical waveguide by proton exchange method. The quality of the furnace temperature control directly affects the quality of the lithium niobate optical waveguide. In order to realize accurate control of the temperature of the furnace, taking the temperature of air as the control object, the proton exchange furnace temperature control model was established based on heat balance mechanism. The stability analysis and PID control simulation by using MATLAB software based on this model were performed. The results show that the built temperature model is stable, and the system with PID control has poor antiinterference ability, which provides a basis for the further study of temperature control strategy.

参考文献

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伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643. FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.

基于热平衡机理的质子交换炉温控系统数学模型

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