半导体光电, 2018, 39 (5): 643, 网络出版: 2019-01-10  

基于热平衡机理的质子交换炉温控系统数学模型

Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism
作者单位
北京航空航天大学 仪器科学与光电工程学院, 北京 100191
引用该论文

伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643.

FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.

参考文献

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伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643. FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.

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