基于热平衡机理的质子交换炉温控系统数学模型
伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643.
FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.
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伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643. FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.